Acta Optica Sinica, Volume. 37, Issue 8, 0812003(2017)

Dynamic Observation of Nanometer-Thick Lubricant Films Based on Improved Ellipsometric Microscope

Qingqing Liu1,2,3、*, Fei Yan1,2,3, and Ying Guo1,2,3
Author Affiliations
  • 1 School of Information and Control, Nanjing University of Infomation Science & Technology, Nanjing, Jiangsu 210044, China;
  • 2 Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology, Nanjing, Jiangsu 210044, China
  • 3 Jiangsu Engineering Research Center on Meteorological Energy Using and Control, Nanjing, Jiangsu 210044, China
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    Figures & Tables(15)
    Schematic diagram of head model
    Relationship of light intensity on detector I and film thickness h
    Relationship of light intensity on detector I and film thickness h with different polarizing angles
    Schematic of VEM structure
    Schematic diagram of light converging on back focal plane of objective lens
    Simulated relationship between contrast ratio Ce and incident angle θ when film thickness h=1 nm
    Microscopic images for different pinhole diameters. (a) 20 μm; (b) 50 μm; (c) 100 μm; (d) 1 mm
    Schematic of light source
    Resolution test result of USAF1951 resolving power test target pattern taken by VEM
    Knife-edge image taken by VEM. (a) Knife-edge parallel to the incident plane; (b) knife-edge perpendicular to the incident plane
    Resolution of VEM obtainedby knife-edge imaging. (a), (b), (c) are the ESF, LSF and MTF curves in the horizontal direction, respectively; (d), (e), (f) are the ESF, LSF and MTF curves in the vertical direction, respectively
    Relationship between the normalized reflected light intensity and film thickness of nonpolar lubricant film
    Dewetting images of lubricant film on the head obtained at different shooting times after film coating. (a) 5 min 30 s; (b) 5 min 50 s; (c) 6 min 10 s; (d) 6 min 30 s
    Magni?ed images of the head lubricant dewetting phenomenon in the upper left rectangle area of Fig. 13 obtained at different shooting times after film coating. (a) 5 min 30 s; (b) 5 min 50 s; (c) 6 min 10 s; (d) 6 min 30 s
    Cross-sectional view at central line L in Fig. 14
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    Qingqing Liu, Fei Yan, Ying Guo. Dynamic Observation of Nanometer-Thick Lubricant Films Based on Improved Ellipsometric Microscope[J]. Acta Optica Sinica, 2017, 37(8): 0812003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 6, 2017

    Accepted: --

    Published Online: Sep. 7, 2018

    The Author Email: Liu Qingqing (sherryliuqq@163.com)

    DOI:10.3788/AOS201737.0812003

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