Acta Optica Sinica, Volume. 37, Issue 8, 0812003(2017)
Dynamic Observation of Nanometer-Thick Lubricant Films Based on Improved Ellipsometric Microscope
Fig. 3. Relationship of light intensity on detector I and film thickness h with different polarizing angles
Fig. 5. Schematic diagram of light converging on back focal plane of objective lens
Fig. 6. Simulated relationship between contrast ratio Ce and incident angle θ when film thickness h=1 nm
Fig. 7. Microscopic images for different pinhole diameters. (a) 20 μm; (b) 50 μm; (c) 100 μm; (d) 1 mm
Fig. 9. Resolution test result of USAF1951 resolving power test target pattern taken by VEM
Fig. 10. Knife-edge image taken by VEM. (a) Knife-edge parallel to the incident plane; (b) knife-edge perpendicular to the incident plane
Fig. 11. Resolution of VEM obtainedby knife-edge imaging. (a), (b), (c) are the ESF, LSF and MTF curves in the horizontal direction, respectively; (d), (e), (f) are the ESF, LSF and MTF curves in the vertical direction, respectively
Fig. 12. Relationship between the normalized reflected light intensity and film thickness of nonpolar lubricant film
Fig. 13. Dewetting images of lubricant film on the head obtained at different shooting times after film coating. (a) 5 min 30 s; (b) 5 min 50 s; (c) 6 min 10 s; (d) 6 min 30 s
Fig. 14. Magni?ed images of the head lubricant dewetting phenomenon in the upper left rectangle area of Fig. 13 obtained at different shooting times after film coating. (a) 5 min 30 s; (b) 5 min 50 s; (c) 6 min 10 s; (d) 6 min 30 s
Get Citation
Copy Citation Text
Qingqing Liu, Fei Yan, Ying Guo. Dynamic Observation of Nanometer-Thick Lubricant Films Based on Improved Ellipsometric Microscope[J]. Acta Optica Sinica, 2017, 37(8): 0812003
Category: Instrumentation, Measurement and Metrology
Received: Feb. 6, 2017
Accepted: --
Published Online: Sep. 7, 2018
The Author Email: Liu Qingqing (sherryliuqq@163.com)