Dynamic Observation of Nanometer-Thick Lubricant Films Based on Improved Ellipsometric Microscope

Qingqing Liu; Fei Yan; Ying Guo

doi:10.3788/AOS201737.0812003

Acta Optica Sinica, Volume. 37, Issue 8, 0812003(2017)

Dynamic Observation of Nanometer-Thick Lubricant Films Based on Improved Ellipsometric Microscope

Qingqing Liu^1,2,3、*, Fei Yan^1,2,3, and Ying Guo^1,2,3

¹ School of Information and Control, Nanjing University of Infomation Science & Technology, Nanjing, Jiangsu 210044, China;

² Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology, Nanjing, Jiangsu 210044, China

³ Jiangsu Engineering Research Center on Meteorological Energy Using and Control, Nanjing, Jiangsu 210044, China

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Qingqing Liu, Fei Yan, Ying Guo. Dynamic Observation of Nanometer-Thick Lubricant Films Based on Improved Ellipsometric Microscope[J]. Acta Optica Sinica, 2017, 37(8): 0812003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Feb. 6, 2017

Accepted: --

Published Online: Sep. 7, 2018

The Author Email: Liu Qingqing (sherryliuqq@163.com)

DOI:10.3788/AOS201737.0812003

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