Chinese Journal of Lasers, Volume. 50, Issue 12, 1202403(2023)

Application of Quantitative Phase Imaging in Ultrafast Laser Processing Inspection

Changheng Li1,2, Shengwei Cui1,2、*, and X. Steve Yao1,2
Author Affiliations
  • 1Photonics Information Innovation Center, College of Physics and Technology, Hebei University, Baoding 071002, Hebei, China
  • 2Hebei Provincial Center for Optical Sensing Innovations, Baoding 071002, Hebei, China
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    Figures & Tables(6)
    Diagram of femtosecond laser processing cavity inside calcium-sodium glass and the cavity structure. (a) Schematic of processing cavity inside calcium-sodium glass using femtosecond laser; (b) cavity structure machined at 4.1 μJ observed under bright-field microscope
    Experimental setup of Mach-Zehnder quantitative phase imaging
    Quantitative phase imaging analysis of the interior of calcium-sodium glass processed by femtosecond laser. (a) Quantitative phase image of the processed cavity with the single pulse energy of 4.1 μJ; (b) phase average curve of the cross-section of the processed cavity with the single pulse energy of 4.1 μJ; (c) diameter of the semicircle refractive-index modified region and the cavity width change with the pulse energy
    Schematic of femtosecond laser processing K9 glass cube and the results analysis. (a) Schematic of femtosecond laser processing K9 glass cube; (b) a photo of the four-sided polished K9 glass cube; (c) top-view of the cavity processed at different pulse energies captured by a microscope; (d) side-view of the cavity processed at different pulses of energies captured by a microscope
    Physical model of femtosecond laser processing in K9 glass cube
    Imaging of cavity processed by femtosecond laser in fused quartz. (a)-(c) Phase diagram, phase curve, and bright-field microscopy image of quartz cube interior in overlooking direction after femtosecond laser machining; (d)-(f) phase diagram, phase curve, and bright-field microscopy image of quartz cube interior in side-view direction after femtosecond laser machining
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    Changheng Li, Shengwei Cui, X. Steve Yao. Application of Quantitative Phase Imaging in Ultrafast Laser Processing Inspection[J]. Chinese Journal of Lasers, 2023, 50(12): 1202403

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Dec. 5, 2022

    Accepted: Feb. 13, 2023

    Published Online: Jun. 6, 2023

    The Author Email: Cui Shengwei (shengwei@hbu.edu.cn)

    DOI:10.3788/CJL221494

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