Acta Optica Sinica, Volume. 34, Issue s1, 112007(2014)

Development of Precision One-Dimensional Adjustment Worktable Based on Aerostatic Bearing Technology

Hou Maosheng*, Ji Lin, Liu Entao, Tian Yanrong, Ma Fei, and Zhao Weiqian
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    References(12)

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    Hou Maosheng, Ji Lin, Liu Entao, Tian Yanrong, Ma Fei, Zhao Weiqian. Development of Precision One-Dimensional Adjustment Worktable Based on Aerostatic Bearing Technology[J]. Acta Optica Sinica, 2014, 34(s1): 112007

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 22, 2014

    Accepted: --

    Published Online: Jul. 22, 2014

    The Author Email: Hou Maosheng (houmsh@126.com)

    DOI:10.3788/aos201434.s112007

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