Acta Optica Sinica, Volume. 34, Issue s1, 112007(2014)
Development of Precision One-Dimensional Adjustment Worktable Based on Aerostatic Bearing Technology
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Hou Maosheng, Ji Lin, Liu Entao, Tian Yanrong, Ma Fei, Zhao Weiqian. Development of Precision One-Dimensional Adjustment Worktable Based on Aerostatic Bearing Technology[J]. Acta Optica Sinica, 2014, 34(s1): 112007
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jan. 22, 2014
Accepted: --
Published Online: Jul. 22, 2014
The Author Email: Hou Maosheng (houmsh@126.com)
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