[1] [1] T Fujii, J Kougo, Y Mizuno, et al.. Portable phase measuring interferometer using Shack-Hartmann method[C]. SPIE, 2003, 5038: 726-732.

[2] [2] T Fujii, K Suzuki, Y Mizuno, et al.. Integrated projecting optics tester for inspection of immersion ArF scanner[C]. SPIE, 2006, 6152: 615237.

[3] [3] Ma Qiang, Liu Weiqi, Li Xiangbo, et al.. Analysis of diffraction wavefront error in point diffraction interferometer[J]. Acta Optica Sinica, 2008, 28(12): 2321-2324.

[4] [4] Lu Zengxiong, Jin Chunshui, Zhang Lichao, et al.. Wave-front quality analysis of three-dimension pinhole vector diffractional in extreme ultraviolet region[J]. Acta Optica Sinica, 2010, 30(10): 2849-2854.

[5] [5] Lu Zengxiong, Jin Chunshui, Ma Dongmei. Rigorous vector analysis of the effect of illumination objective lens aberration on the quality of far-field diffracted wave front[J]. Acta Optica Sinica, 2012, 32(8): 0812001.

[6] [6] Lu Zengxiong, Jin Chunshui, Ma Dongmei, et al.. Analysis of effect of tiny pinhole deviation on far-field wave-front quality[J]. Acta Optica Sinica, 2011, 31(8): 0812002.

[7] [7] Chen Chen, Yang Yongying, Wang Daodang, et al.. Analysis of point diffraction wavefront error based on finite difference time domain method[J]. Chinese J Lasers, 2011, 38(9): 0908003.

[8] [8] Xu Jiajun, Xing Tingwen. Analysis of two-dimensional pinhole vector diffraction in visible light[J]. Acta Optica Sinica, 2011, 31(12): 1205003.

[9] [9] Wang Li, Rao Changhui, Rao Xuejun. Analysis of wave-front error for nanometer pinhole vector diffraction[J]. Optics and Precision Engineering, 2012, 20(3): 499-505.

[10] [10] Zheng Meng, Li Yanqiu, Liu Ke. Design of mask for phase- shifting point diffraction interferometer[J]. Laser & Optoelectronics Progress, 2013, 50(3): 031201.

[11] [11] Gao Fen, Jiang Zhuangde, Lin Bing. Analysis of diffraction wavefront error caused by alignment error of pinhole[J]. Acta Optica Sinica, 2014, 34(8): 0812004.

[12] [12] Y Sekine, A Suzuki, M Hasegawa, et al.. Wave- front errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. J Vac Sci Technol B, 2004, 22(1): 104-108.

[13] [13] K Otaki, Y Zhu, M Ishii, et al.. Rigorous wave front analysis of the visible-light point diffraction interferometer for EUVL[C]. SPIE, 2004, 5193: 182-190.

[14] [14] Alien T. Computational Electromagnetic: Finite-Difference Time-Domain Method[M]. Boston: Artech House, 2005. 329-352.

[15] [15] Daniel Malacara-Hernandez, Martin Carpio-Valadez, Jose Javier Sanchez-Mondragon. Wavefront fitting with discrete orthogonal polynomials in a unit radius circle[J]. Opt Eng, 1990, 29(6): 672-675.

[16] [16] D J Fischer, J T O′Bryan, R Lopez, et al.. Vector formulation for interferogram surface fitting[J]. Appl Opt, 1993, 32(25): 4738-4743.