Chinese Journal of Lasers, Volume. 42, Issue 2, 208001(2015)
Analysis of Effect of Numerical Aperture of Illumination Objective Lens on Quality of Wavefront Diffracted by Tiny Pinhole
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Qi Yuejing, Lu Zengxiong, Yang Guanghua, Liu Chengtao, Peng Zhuojun. Analysis of Effect of Numerical Aperture of Illumination Objective Lens on Quality of Wavefront Diffracted by Tiny Pinhole[J]. Chinese Journal of Lasers, 2015, 42(2): 208001
Paper Information
Category: measurement and metrology
Received: Jul. 29, 2014
Accepted: --
Published Online: Dec. 12, 2014
The Author Email: Qi Yuejing (qiyuejing@aoe.ac.cn)
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