Chinese Journal of Lasers, Volume. 48, Issue 19, 1901002(2021)

Advances on Mid-Infrared Germanium Integrated Photonics

Rongxiang Guo1,2, Haoran Gao1,2, Zhenzhou Cheng1,2、*, and Tiegen Liu1,2
Author Affiliations
  • 1School of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Key Laboratory of Optoelectronics Information Technology, Ministry of Education, Tianjin 300072, China
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    Figures & Tables(10)
    Mid-infrared group-IV photonics and its applications
    Structural diagrams of germanium wafers and scanning electron microscope (SEM) images of germanium waveguides. (a) Structural diagrams of germanium wafers[51-54]; (b) SEM image of GOS waveguide[51]; (c) SEM image of GOSOI waveguide[52]; (d) SEM image of GOSiN waveguide[53]; (e) SEM image of GOI waveguide[56]
    Germanium grating couplers. (a) SEM image of GOS grating coupler[57]; (b) SEM image of GOS grating coupler with low-reflectivity[65]; (c) SEM image of GOSOI grating coupler[66]; (d) SEM image of GOI focusing subwavelength grating (SWG) coupler[56]; (e) simulated and experimental results of GOI focusing SWG[56]
    Germanium microring resonators. (a) SEM image of GOI vernier-effect microring resonator[73]; (b) SEM image of GOI microring resonator[67]; (c) SEM image of GOI high-Q factor microring resonator[75]; (d) free spectral range measurement of GOI high-Q factor microring resonator[75]; (e) Q factor measurement of GOI high-Q microring resonator[75]
    Germanium photonic crystal cavities. (a) SEM image of germanium photonic crystal cavity[81]; (b) simulated results of germanium photonic crystal cavity[81]; (c) measurement results of germanium photonic crystal cavity[81]; (d) SEM image of germanium photonic crystal nanobeam cavity[82]; (e) measurement results of germanium photonic crystal nanobeam cavity[82]
    Germanium waveguide active devices. (a) Structural diagram and SEM image of low-threshold germanium nanowire laser[92]; (b) SEM image of germanium thermal phase shifter[95]; (c) SEM image of germanium modulator with PIN diode[98]; (d) SEM image of germanium all-optical modulator[99]
    Germanium waveguide devices used for biochemical sensors. (a) Experimental principle of infrared absorption spectroscopic measurement of bovine serum protein (BSA) using germanium waveguide [104]; (b) system image for infrared absorption spectrum measurement of BSA and aggregates using germanium waveguide [105]; (c) schematic of infrared absorption spectrum measurement of BSA and aggregates using germanium waveguide [105]
    Nonlinear optical study of germanium waveguide devices. (a) Measurement results of two-photon absorption coefficient of GOS waveguide[100]; (b) schematic of stimulated Brillouin scattering[111]; (c) structural diagram of Raman laser[113]; (d) experimental results of supercontinuum generation[118]
    Simulated results of mid-infrared germanium Kerr frequency comb. (a) Structural diagram of germanium Kerr frequency comb model; (b) temporal and spectral curves of intra-cavity field with pump wavelength of 2.8 μm; (c) temporal and spectral curves of intra-cavity field with pump wavelength of 3.5 μm
    • Table 1. Performance comparison among reported germanium waveguides

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      Table 1. Performance comparison among reported germanium waveguides

      No.PlatformWavelength /μmLoss /(dB·cm-1)Structrue typeYearRef.
      1GOS5.82.5Strip2012[51]
      2GOS5.33Strip2013[62]
      3GOSOI5.37Strip2014[55]
      4GOS3.80.6Rib2015[57]
      5GOSOI3.88Strip2016[52]
      6GOSOI3.83.5Strip2016[58]
      7GOSiN3.83.35Strip2016[53]
      8GOI214Rib2016[54]
      9GOS7.62.5Rib2017[59]
      10GOSOI7.62.6Rib2018[61]
      11GOS11.2510Rib2018[63]
      12GOS101Rib2018[60]
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    Rongxiang Guo, Haoran Gao, Zhenzhou Cheng, Tiegen Liu. Advances on Mid-Infrared Germanium Integrated Photonics[J]. Chinese Journal of Lasers, 2021, 48(19): 1901002

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    Paper Information

    Category: laser devices and laser physics

    Received: Jun. 15, 2021

    Accepted: Jul. 26, 2021

    Published Online: Sep. 14, 2021

    The Author Email: Zhenzhou Cheng (zhenzhoucheng@tju.edu.cn)

    DOI:10.3788/CJL202148.1901002

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