Chinese Journal of Lasers, Volume. 48, Issue 19, 1901002(2021)
Advances on Mid-Infrared Germanium Integrated Photonics
Fig. 2. Structural diagrams of germanium wafers and scanning electron microscope (SEM) images of germanium waveguides. (a) Structural diagrams of germanium wafers[51-54]; (b) SEM image of GOS waveguide[51]; (c) SEM image of GOSOI waveguide[52]; (d) SEM image of GOSiN waveguide[53]; (e) SEM image of GOI waveguide[56]
Fig. 3. Germanium grating couplers. (a) SEM image of GOS grating coupler[57]; (b) SEM image of GOS grating coupler with low-reflectivity[65]; (c) SEM image of GOSOI grating coupler[66]; (d) SEM image of GOI focusing subwavelength grating (SWG) coupler[56]; (e) simulated and experimental results of GOI focusing SWG[56]
Fig. 4. Germanium microring resonators. (a) SEM image of GOI vernier-effect microring resonator[73]; (b) SEM image of GOI microring resonator[67]; (c) SEM image of GOI high-Q factor microring resonator[75]; (d) free spectral range measurement of GOI high-Q factor microring resonator[75]; (e) Q factor measurement of GOI high-Q microring resonator[75]
Fig. 5. Germanium photonic crystal cavities. (a) SEM image of germanium photonic crystal cavity[81]; (b) simulated results of germanium photonic crystal cavity[81]; (c) measurement results of germanium photonic crystal cavity[81]; (d) SEM image of germanium photonic crystal nanobeam cavity[82]; (e) measurement results of germanium photonic crystal nanobeam cavity[82]
Fig. 7. Germanium waveguide devices used for biochemical sensors. (a) Experimental principle of infrared absorption spectroscopic measurement of bovine serum protein (BSA) using germanium waveguide [104]; (b) system image for infrared absorption spectrum measurement of BSA and aggregates using germanium waveguide [105]; (c) schematic of infrared absorption spectrum measurement of BSA and aggregates using germanium waveguide [105]
Fig. 8. Nonlinear optical study of germanium waveguide devices. (a) Measurement results of two-photon absorption coefficient of GOS waveguide[100]; (b) schematic of stimulated Brillouin scattering[111]; (c) structural diagram of Raman laser[113]; (d) experimental results of supercontinuum generation[118]
Fig. 9. Simulated results of mid-infrared germanium Kerr frequency comb. (a) Structural diagram of germanium Kerr frequency comb model; (b) temporal and spectral curves of intra-cavity field with pump wavelength of 2.8 μm; (c) temporal and spectral curves of intra-cavity field with pump wavelength of 3.5 μm
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Rongxiang Guo, Haoran Gao, Zhenzhou Cheng, Tiegen Liu. Advances on Mid-Infrared Germanium Integrated Photonics[J]. Chinese Journal of Lasers, 2021, 48(19): 1901002
Category: laser devices and laser physics
Received: Jun. 15, 2021
Accepted: Jul. 26, 2021
Published Online: Sep. 14, 2021
The Author Email: Zhenzhou Cheng (zhenzhoucheng@tju.edu.cn)