Infrared and Laser Engineering, Volume. 54, Issue 5, 20240578(2025)

Alignment integration technology of micro-polarizer array sensor

Yuanyu JI1, Chuanlong GUAN1, and Jinkui CHU1,2
Author Affiliations
  • 1School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China
  • 2Ningbo Institute of Dalian University of Technology, Ningbo 315016, China
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    References(19)

    [1] [1] CHIPMAN A R, YOUNG G, LAM T S W. Polarized Light Optical Systems[M]. Flida: CRC Press, 2018.

    [2] LUO Haibo, ZHANG Junchao, GAI Xingqin. Development status and prospects of polarization imaging technology (invited)[J]. Infrared and Laser Engineering, 51, 20210987(2022).

    [4] [4] TIAN Bowen. Research on detection method of cancerous tissue based on polarization imaging[D]. Changchun: Changchun University of Science Technology, 2020. (in Chinese)

    [6] LI Zhiyuan, ZHAI Aiping, JI Yingze. Research, application and progress of optical polarization imaging technology[J]. Infrared and Laser Engineering, 52, 20220808(2023).

    [7] [7] TOKUDA T, SATO S, YAMADA H, et al. Polarization analyzing CMOS sens f microchambermicrofluidic system based on image sens technology[C]2008 IEEE International Symposium on Circuits Systems (ISCAS), 2008: 31623165.

    [13] [13] MA Xuan. Development of highperfmance pixelatedpolarizationcamera related application research[D]. Hefei: University of Science Technology of China, 2019. (in Chinese)

    [15] GUAN C, ZHANG R, CHU J et al. Integrated real-time polarization image sensor based on UV-NIL and calibration method[J]. IEEE Sensors Journal, 22, 3157-3163(2022).

    [16] [16] ZHANG Shiyuan. Polarization imaging based on twisted liquid crystal micropolarizer array [D]. Beijing: University of Chinese Academy of Sciences, 2022. (in Chinese)

    [17] WANG Quandai, DUAN Yugang, LU Bingheng. Alignment system based on video image for MEMS multi-layer imprint fabrication process[J]. Opto-Electronic Engineering, 84-88(2005).

    [19] FENG B, SHI Z, LIU H et al. Polarized-pixel performance model for DoFP polarimeter[J]. Journal of Optics, 20, 065703(2018).

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    Yuanyu JI, Chuanlong GUAN, Jinkui CHU. Alignment integration technology of micro-polarizer array sensor[J]. Infrared and Laser Engineering, 2025, 54(5): 20240578

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    Paper Information

    Category: 光通信与光传感

    Received: Jan. 2, 2025

    Accepted: --

    Published Online: May. 26, 2025

    The Author Email:

    DOI:10.3788/IRLA20240578

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