Fig. 1. Nanoimprint process flowchart

Fig. 2. SEM image of metal nano grating array

Fig. 3. Schematic draw of the misalignment between the pixel array of the CMOS sensor (yellow) and the micro-polarizer array (blue)

Fig. 4. Average degree of linear polarization of sensor pixel response is obtained as a function of the misalignments

Fig. 5. Schematic draw of the rotation error between the micro-polarizer array (red) and the pixel array of the sensor (black); (b) The maximum allowable rotation error θ is obtained as a function of the number of pixels n

Fig. 6. Common alignment system for nanoimprint machines^[17]

Fig. 7. Microscopic imaging photo of (a) nanowire grid array and (b) pixel array

Fig. 8. Alignment operation flowchart

Fig. 9. (a) Alignment platform; (b) Schematic draw of alignment device structure based on micro-vision

Fig. 10. Special sucker designed for small-sized soft templates

Fig. 11. Alignment program flow chart

Fig. 12. Experimental device for testing micro-polarizer array sensor

Fig. 13. (a) Response results of misaligned sensor to polarized light; (b) Response results of aligned sensor to polarized light; (c) Design effect of micro-polarizer array

Fig. 14. (a) Sampling from the aligned sensor; (b) Sampling from the misaligned sensor

Fig. 15. Polarized-pixel response pseudo-color image. (a) The aligned sensor; (b) The misaligned sensor

Fig. 16. Statistical graph of pixel value in polarization sensitive areas. (a) The aligned sensor; (b) The misaligned sensor

Fig. 17. Equipment for outdoor test experiment

Fig. 18. Results of the outdoor experiment. （a） Intensity image; （b） Angle of polarization images