High Power Laser Science and Engineering, Volume. 6, Issue 1, 010000e9(2018)
Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process
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Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process[J]. High Power Laser Science and Engineering, 2018, 6(1): 010000e9
Category: Research Articles
Received: Oct. 22, 2017
Accepted: Jan. 3, 2018
Published Online: Jul. 4, 2019
The Author Email: Jinbin Ding (dinglaser@163.com)