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High Power Laser Science and Engineering, Volume. 6, Issue 1, 010000e9(2018)

Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process

Xin Guo1,2, Jinbin Ding1,2、†, Yi Zhou1,2, and Yu Wang1,2
Author Affiliations
  • 1Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China
  • 2Beijing Excimer Laser Technology and Engineering Center, Beijing 100094, China
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    Article index updated:Feb. 24, 2023

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    Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process[J]. High Power Laser Science and Engineering, 2018, 6(1): 010000e9

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    Paper Information

    Category: Research Articles

    Received: Oct. 22, 2017

    Accepted: Jan. 3, 2018

    Published Online: Jul. 4, 2019

    The Author Email: Jinbin Ding (dinglaser@163.com)

    DOI:10.1017/hpl.2018.2

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology