High Power Laser Science and Engineering, Volume. 6, Issue 1, 010000e9(2018)
Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process
Fig. 1. The morphology of the corroded anode. (a) Surface morphology by OM. (b) Surface morphology by SEM. (c) Subsurface morphology by SEM.
Fig. 2. (a) The cross section morphology and (b) C, (c) O, (d) F, (e) Cu, (f) Al element distributions of the corroded anode.
Fig. 3. The surface morphologies of the corroded cathode by (a) OM and (b) SEM.
Fig. 4. (a) The cross section morphology and (b) C, (c) O, (d) F, (e) Cu, (f) Zn element distributions of the corroded cathode.
Fig. 5. The morphologies of (a) the flakes generated by the anode and (b) the particles generated by the cathode.
Fig. 6. The trace elements distribution of a copper part. (a) Surface content
Fig. 7. The distribution diagram of reaction layers and elements of the corroded electrodes.
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Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process[J]. High Power Laser Science and Engineering, 2018, 6(1): 010000e9
Category: Research Articles
Received: Oct. 22, 2017
Accepted: Jan. 3, 2018
Published Online: Jul. 4, 2019
The Author Email: Jinbin Ding (dinglaser@163.com)