Chinese Optics Letters, Volume. 13, Issue 4, 041402(2015)

Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses

Guangming Zhang1, Xin Li1、*, Lan Jiang1, Xuesong Shi1, Kaihu Zhang1, Qiang Cao1, and Yongfeng Lu2
Author Affiliations
  • 1Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
  • 2Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA
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    References(24)

    [4] N. Leng, L. Jiang, X. Li, C. C. Xu, P. J. Liu, Y. F. Lu. Appl Phys A, 679, 109(2012).

    [5] S. Bashir, H. Vaheed, K. Mahmood. Appl. Phys. A, 389, 110(2013).

    [8] G. Daminelli, J. Krüger, W. Kautek. Thin Solid Films, 334, 467(2004).

    [17] C. Xu, L. Jiang, N. Leng, Y. Yuan, P. Liu, C. Wang, Y. Lu. Chin. Opt. Lett., 11, 041403(2013).

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    Guangming Zhang, Xin Li, Lan Jiang, Xuesong Shi, Kaihu Zhang, Qiang Cao, Yongfeng Lu. Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses[J]. Chinese Optics Letters, 2015, 13(4): 041402

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Dec. 5, 2014

    Accepted: Jan. 16, 2015

    Published Online: Sep. 21, 2018

    The Author Email: Xin Li (lixin02@bit.edu.cn)

    DOI:10.3788/COL201513.041402

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