Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses

Guangming Zhang; Xin Li; Lan Jiang; Xuesong Shi; Kaihu Zhang; Qiang Cao; Yongfeng Lu

doi:10.3788/COL201513.041402

Chinese Optics Letters, Volume. 13, Issue 4, 041402(2015)

Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses

Guangming Zhang¹, Xin Li^1、*, Lan Jiang¹, Xuesong Shi¹, Kaihu Zhang¹, Qiang Cao¹, and Yongfeng Lu²

¹Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

²Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA

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Guangming Zhang, Xin Li, Lan Jiang, Xuesong Shi, Kaihu Zhang, Qiang Cao, Yongfeng Lu. Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses[J]. Chinese Optics Letters, 2015, 13(4): 041402

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Paper Information

Category: Lasers and Laser Optics

Received: Dec. 5, 2014

Accepted: Jan. 16, 2015

Published Online: Sep. 21, 2018

The Author Email: Xin Li (lixin02@bit.edu.cn)

DOI:10.3788/COL201513.041402

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology