Chinese Optics Letters, Volume. 13, Issue 4, 041402(2015)

Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses

Guangming Zhang1, Xin Li1、*, Lan Jiang1, Xuesong Shi1, Kaihu Zhang1, Qiang Cao1, and Yongfeng Lu2
Author Affiliations
  • 1Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
  • 2Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA
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    Figures & Tables(4)
    SEM images of craters produced by 20 double pulses at a repetition rate of 20 Hz in different mediums: (a) in air, F=0.6 J/cm2; (b) in ethanol, F=0.4 J/cm2; (c) in ethanol, F=0.6 J/cm2.
    Ablation area as a function of the pulse delays at different laser fluences: (a) air, (b) ethanol.
    SEM images of crater morphologies obtained at Δt=500 fs in (a) air and (b) ethanol. Two-dimensional profiles of the craters produced in (c) air and (d) ethanol.
    Ablation area as a function of pulse delays in Ge in the ethanol solution.
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    Guangming Zhang, Xin Li, Lan Jiang, Xuesong Shi, Kaihu Zhang, Qiang Cao, Yongfeng Lu. Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses[J]. Chinese Optics Letters, 2015, 13(4): 041402

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Dec. 5, 2014

    Accepted: Jan. 16, 2015

    Published Online: Sep. 21, 2018

    The Author Email: Xin Li (lixin02@bit.edu.cn)

    DOI:10.3788/COL201513.041402

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