[1] Minsky P M. Microscopy apparatus[P].

[2] Minsky P M. Confocal microscope[J]. United States Patents, 6(1961).

[3] Minsky P M. Memoir on inventing the confocal scanning microscope[J]. Scanning, 10, 128-138(1988).

[4] Weisshart K. The basic principle of airyscanning[J]. Zeiss Technology Note, 22(2014).

[5] Callamaras N, Parker I. Construction of a confocal microscope for real-time x-y and x-z imaging[J]. Cell Calcium, 26, 271-279(1999).

[6] Trepte O, Liljeborg A. Computer control for a galvanometer scanner in a confocal scanning laser microscope[J]. Optical Engineering, 33, 3774-3780(1994).

[7] Hu M H, Yang X C. High-speed laser scanning control system for confocal microscopy[J]. Journal of Applied Optics, 32, 797-800(2011).

[8] Kim C S, Yoo H. Three-dimensional confocal reflectance microscopy for surface metrology[J]. Measurement Science and Technology, 32, 102002(2021).

[9] Ra H, Taguchi Y, Lee D et al. Two-dimensional MEMS scanner for dual-axes confocal in vivo microscopy[C], 862-865(2006).

[10] Liu T B, Dickensheets D L. MEMS 3-dimensional scanner for handheld confocal microscope[C](2017).

[11] Seo J, Kang D K, Park S et al. 3D image reconstruction using optical sectioning in confocal scanning microscopy[J]. Proceedings of SPIE, 4564, 58-65(2001).

[12] Bansal V, Patel S, Saggau P. High-speed confocal laser scanning microscopy using acousto-optic deflectors and a digital micromirror device[J]. Proceedings of SPIE, 5324, 47-54(2004).

[13] Lee S, Kang D K, Yoo H et al. Design and performance evaluation of reflection confocal microscopy using acousto-optical deflector and slit detector[J]. Proceedings of SPIE, 5324, 235-241(2004).

[14] Han S M, Im K B, Park H et al. High speed slit-scanning confocal laser microscopy with an acousto-optic beam deflector and a line scan camera[J]. Proceedings of SPIE, 5701, 164-171(2005).

[15] Li Y G, Liu L, Amthor F et al. High-speed line-scan confocal imaging of stimulus-evoked intrinsic optical signals in the retina[J]. Optics Letters, 35, 426-428(2010).

[16] Petráň M, Hadravský M, Egger M D et al. Tandem-scanning reflected-light microscope[J]. Journal of the Optical Society of America, 58, 661-664(1968).

[17] Xiao G Q, Corle T R, Kino G S. Real-time confocal scanning optical microscope[J]. Applied Physics Letters, 53, 716-718(1988).

[18] Fuseler J, Jerome W G, Price R L. Types of confocal instruments: basic principles and advantages and disadvantages[M]. Basic confocal microscopy, 187-213(2018).

[19] Tiziani H J, Uhde H M. Three-dimensional analysis by a microlens-array confocal arrangement[J]. Applied Optics, 33, 567-572(1994).

[20] Tanaami T, Otsuki S, Tomosada N et al. High-speed 1-frame/ms scanning confocal microscope with a microlens and Nipkow disks[J]. Applied Optics, 41, 4704-4708(2002).

[21] Jeong H J, Yoo H, Gweon D. High-speed 3-D measurement with a large field of view based on direct-view confocal microscope with an electrically tunable lens[J]. Optics Express, 24, 3806-3816(2016).

[22] Kim C S, Kim W, Lee K et al. High-speed color three-dimensional measurement based on parallel confocal detection with a focus tunable lens[J]. Optics Express, 27, 28466-28479(2019).

[23] Smith P J, Taylor C M, Shaw A J et al. Programmable array microscopy with a ferroelectric liquid-crystal spatial light modulator[J]. Applied Optics, 39, 2664-2669(2000).

[24] Taylor C M, McCabe E M. Programmable array microscope employing two ferroelectric liquid crystal spatial light modulators[J]. Proceedings of SPIE, 4261, 33-39(2001).

[25] Liang M H, Stehr R L, Krause A W. Confocal pattern period in multiple-aperture confocal imaging systems with coherent illumination[J]. Optics Letters, 22, 751-753(1997).

[26] Neil M A A, Wilson T, Juskaitis R. A wavefront generator for complex pupil function synthesis and point spread function engineering[J]. Journal of Microscopy, 197, 219-223(2000).

[27] Zou L M, Pang M S, Zhou M J et al. Multifocal axial confocal microscopic scanning with a phase-only liquid crystal spatial light modulator[J]. Proceedings of SPIE, 9446, 94462X(2015).

[28] Luo T P, Yuan J, Chang J et al. Resolution and uniformity improvement of parallel confocal microscopy based on microlens arrays and a spatial light modulator[J]. Optics Express, 31, 4537-4552(2023).

[29] Zhang Y B, Strube S, Molnar G et al. Parallel large-range scanning confocal microscope based on a digital micromirror device[J]. Optik, 124, 1585-1588(2013).

[30] Zhang Y B, Zeng A J, Huang H J et al. Large-area three-dimensional profilometer based on digital micromirror device[J]. Journal of Optical Technology, 82, 102-107(2015).

[31] Zhu Q, Yang X B, Li S M et al. Spot array optimization of parallel confocal imaging based on digital micromirror device[J]. Acta Optica Sinica, 38, 0118001(2018).

[32] Im K B, Han S M, Park H et al. Simple high-speed confocal line-scanning microscope[J]. Optics Express, 13, 5151-5156(2005).

[33] Dusch E, Dorval T, Vincent N et al. Three-dimensional point spread function model for line-scanning confocal microscope with high-aperture objective[J]. Journal of Microscopy, 228, 132-138(2007).

[34] Gareau D S, Abeytunge S, Rajadhyaksha M. Line-scanning reflectance confocal microscopy of human skin: comparison of full-pupil and divided-pupil configurations[J]. Optics Letters, 34, 3235-3237(2009).

[35] Kim M S, Choi H S, Lee S H et al. A high-speed particle-detection in a large area using line-laser light scattering[J]. Current Applied Physics, 15, 930-937(2015).

[36] Dong J T. Line-scanning laser scattering system for fast defect inspection of a large aperture surface[J]. Applied Optics, 56, 7089-7098(2017).

[37] Wang F S, Tan J B, Zhao W Q. Optical probe using differential confocal technique for surface profile[J]. Proceedings of SPIE, 4222, 194-197(2000).

[38] Zhao W Q, Sun R D, Qiu L R et al. Laser differential confocal ultra-long focal length measurement[J]. Optics Express, 17, 20051-20062(2009).

[39] Zhao W Q, Sun R D, Qiu L R et al. Laser differential confocal radius measurement[J]. Optics Express, 18, 2345-2360(2010).

[40] Wang Y, Qiu L R, Song Y X et al. Laser differential confocal lens thickness measurement[J]. Measurement Science and Technology, 23, 055204(2012).

[41] Yang J M, Qiu L R, Zhao W Q et al. Laser differential reflection-confocal focal-length measurement[J]. Optics Express, 20, 26027-26036(2012).

[42] Zhao W Q, Zhang X, Wang Y et al. Laser reflection differential confocal large-radius measurement[J]. Applied Optics, 54, 9308-9314(2015).

[43] Tan J B, Liu J, Wang Y H. Differential confocal microscopy with a wide measuring range based on polychromatic illumination[J]. Measurement Science and Technology, 21, 054013(2010).

[44] Zhao W Q, Jiang Q, Qiu L R et al. Dual-axes differential confocal microscopy with high axial resolution and long working distance[J]. Optics Communications, 284, 15-19(2011).

[45] Zhao W Q, Liu C, Qiu L R. Laser divided-aperture differential confocal sensing technology with improved axial resolution[J]. Optics Express, 20, 25979-25989(2012).

[46] Sun Y B, Zhao W Q, Qiu L R et al. Axial high-resolution differential confocal microscopy[J]. Measurement Science and Technology, 30, 125402(2019).

[47] Li R J, Zhang R R, Cui H et al. Divided-aperture dual-differential confocal microscopy[J]. Proceedings of SPIE, 11914, 1191414(2021).

[48] Lai D M, Kong L H, Lian G F et al. Differential confocal measurement method of linear scanning based on dual linear array camera[J]. Journal of Applied Optics, 43, 298-303(2022).

[49] Lee D R, Kim Y D, Gweon D G et al. High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy[J]. Measurement Science and Technology, 25, 125403(2014).

[50] Lee D R, Jang S, Lee M W et al. Compact fiber optic dual-detection confocal displacement sensor[J]. Applied Optics, 55, 7631-7635(2016).

[51] Lee D, Gweon D G, Yoo H. Multipoint scanning dual-detection confocal microscopy for fast 3D volumetric measurement[J]. Journal of Microscopy, 270, 200-209(2018).

[52] Lee D R, Gweon D G, Yoo H. Annular-beam dual-detection confocal reflectance microscopy for high-speed three-dimensional surface profiling with an extended volume[J]. Measurement Science and Technology, 31, 045403(2020).

[53] Tearney G J, Webb R H, Bouma B E. Spectrally encoded confocal microscopy[J]. Optics Letters, 23, 1152-1154(1998).

[54] Kim J, Kang D, Gweon D. Spectrally encoded slit confocal microscopy[J]. Optics Letters, 31, 1687-1689(2006).

[55] Hwang J, Kim S, Heo J et al. Frequency- and spectrally-encoded confocal microscopy[J]. Optics Express, 23, 5809-5821(2015).

[56] Feng P P, Kang J Q, Tan S S et al. Dual-comb spectrally encoded confocal microscopy by electro-optic modulators[J]. Optics Letters, 44, 2919-2922(2019).

[57] Molesini G, Pedrini G, Poggi P et al. Focus-wavelength encoded optical profilometer[J]. Optics Communications, 49, 229-233(1984).

[58] Browne M A, Akinyemi O, Boyde A. Confocal surface profiling utilizing chromatic aberration[J]. Scanning, 14, 145-153(1992).

[59] Chun B S, Kim K, Gweon D. Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope[J]. The Review of Scientific Instruments, 80, 073706(2009).

[60] Kim T, Kim S H, Do D et al. Chromatic confocal microscopy with a novel wavelength detection method using transmittance[J]. Optics Express, 21, 6286-6294(2013).

[61] Zhang K. Chromatic confocal three-dimensional topography measurement system based on color spatial modulation technology and experimental research[D](2020).

[62] Tiziani H J, Uhde H M. Three-dimensional image sensing by chromatic confocal microscopy[J]. Applied Optics, 33, 1838-1843(1994).

[63] Maly M, Boyde A. Real-time stereoscopic confocal reflection microscopy using objective lenses with linear longitudinal chromatic dispersion[J]. Scanning, 16, 187-192(1994).

[64] Dobson S L, Sun P C, Fainman Y. Diffractive lenses for chromatic confocal imaging[J]. Applied Optics, 36, 4744-4748(1997).

[65] Hillenbrand M, Mitschunas B, Wenzel C et al. Hybrid hyperchromats for chromatic confocal sensor systems[J]. Advanced Optical Technologies, 1, 187-194(2012).

[66] Tiziani H J, Uhde H M. Three-dimensional analysis by a microlens-array confocal arrangement[J]. Applied Optics, 33, 567-572(1994).

[67] Lin P C, Sun P C, Zhu L J et al. Single-shot depth-section imaging through chromatic slit-scan confocal microscopy[J]. Applied Optics, 37, 6764-6770(1998).

[68] Prause K, Herkommer A, Pinzer B R et al. Single-shot high speed aerial chromatic confocal metrology sensor[J]. Optical Engineering, 60, 124110(2021).

[69] Zhuo G Y, Hsu C H, Wang Y H et al. Chromatic confocal microscopy to rapidly reveal nanoscale surface/interface topography by position-sensitive detection[J]. Applied Physics Letters, 113, 083106(2018).