Laser & Optoelectronics Progress, Volume. 60, Issue 8, 0811007(2023)

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

Yueying Wang1,2, Xu Liu1、**, and Xiang Hao1,2、*
Author Affiliations
  • 1College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang, China
  • 2Intelligence Optics and Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing 314000, Zhejiang, China
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    Figures & Tables(8)
    Imaging schematic of wide field microscope and confocal microscope. (a) Wide field microscope; (b) confocal microscope
    Schematic of the Nipkow disk[17]
    Different confocal scanning methods and scanning schematic on the sample plane. (a) (e) Single point scanning confocal microscopy based on GM; (b) (f) confocal microscopy using Nipkow disk; (c) (g) parallel scanning confocal microscopy based on SLM; (d) (h) line scanning confocal microscopy
    Laser differential confocal for axial localization. (a) Laser differential confocal[37]; (b) divided-aperture differential confocal[45]
    Dual-detection confocal for axial localization[49]
    Spectrally encoded confocal microscopy[53]
    Confocal imaging system. (a) Schematic of dispersion confocal imaging system[59]; (b) principle of dispersion confocal fast detection based on transmission detection[60]
    • Table 1. Comparison of different confocal methods for 3D topography measurement

      View table

      Table 1. Comparison of different confocal methods for 3D topography measurement

      StrategyTechniqueAdvantageLimitationReference

      method

      Scanning

      Point scanning confocal microscopy

      High light efficiency,

      variable scanning range

      Slow frame rate513
      Parallel scanning confocal microscopyFast frame rateLow light efficiency,fixed field of view17202325
      Line scanning confocal microscopyFast frame rate,no fast-axis scanning device neededLow light efficiency,fixed scanning range,poor fast-axis resolution32-34

      method

      Detection

      Laser differential confocal microscopyFast frame rate,high axial resolution,no axial scanning device neededLow detection efficiency,limited axial localization range with high resolution3745
      Dual-detection confocal microscopyFast frame rate,simple data processing,no axial scanning device needed

      Low detection efficiency,

      poor axial resolution

      49-50
      Spectral based methodSpectrally encoded microscopyNo fast-axis scanning device neededSlow frame rate5355
      Chromatic confocal microscopy

      High axial resolution,

      large axial localization range,

      no axial scanning device needed

      Slow frame rate57-59
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    Yueying Wang, Xu Liu, Xiang Hao. Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement[J]. Laser & Optoelectronics Progress, 2023, 60(8): 0811007

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    Paper Information

    Category: Imaging Systems

    Received: Jan. 26, 2023

    Accepted: Mar. 6, 2023

    Published Online: Apr. 13, 2023

    The Author Email: Liu Xu (liuxu@zju.edu.cn), Hao Xiang (haox@zju.edu.cn)

    DOI:10.3788/LOP230533

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