Laser & Optoelectronics Progress, Volume. 60, Issue 8, 0811007(2023)
Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement
Fig. 1. Imaging schematic of wide field microscope and confocal microscope. (a) Wide field microscope; (b) confocal microscope
Fig. 2. Schematic of the Nipkow disk[17]
Fig. 3. Different confocal scanning methods and scanning schematic on the sample plane. (a) (e) Single point scanning confocal microscopy based on GM; (b) (f) confocal microscopy using Nipkow disk; (c) (g) parallel scanning confocal microscopy based on SLM; (d) (h) line scanning confocal microscopy
Fig. 5. Dual-detection confocal for axial localization[49]
Fig. 6. Spectrally encoded confocal microscopy[53]
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Yueying Wang, Xu Liu, Xiang Hao. Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement[J]. Laser & Optoelectronics Progress, 2023, 60(8): 0811007
Category: Imaging Systems
Received: Jan. 26, 2023
Accepted: Mar. 6, 2023
Published Online: Apr. 13, 2023
The Author Email: Liu Xu (liuxu@zju.edu.cn), Hao Xiang (haox@zju.edu.cn)