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Laser & Optoelectronics Progress, Volume. 60, Issue 8, 0811007(2023)

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

Yueying Wang1,2, Xu Liu1、**, and Xiang Hao1,2、*
Author Affiliations
  • 1College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang, China
  • 2Intelligence Optics and Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing 314000, Zhejiang, China
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    Article index updated:May. 21, 2024

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    Yueying Wang, Xu Liu, Xiang Hao. Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement[J]. Laser & Optoelectronics Progress, 2023, 60(8): 0811007

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    Paper Information

    Category: Imaging Systems

    Received: Jan. 26, 2023

    Accepted: Mar. 6, 2023

    Published Online: Apr. 13, 2023

    The Author Email: Liu Xu (liuxu@zju.edu.cn), Hao Xiang (haox@zju.edu.cn)

    DOI:10.3788/LOP230533

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology