Laser & Optoelectronics Progress, Volume. 57, Issue 21, 211203(2020)
Surface Roughness Measurement Using Laser Confocal Microscope with Boundary Area Correction
[1] Whitehouse D J. Surface metrology[J]. Measurement Science and Technology, 8, 955-972(1997).
[2] Wu S Q[M]. Application guide of surface roughness(1990).
[4] Young R D. Surface microtopography[J]. Physics Today, 24, 42-49(1971).
[6] Zhu X[J]. Scanning near-field optical microscope Modern Scientific Instruments, 1996, 7-9.
[7] Dürig U, Pohl D W, Rohner F. Near-field optical-scanning microscopy[J]. Journal of Applied Physics, 59, 3318-3327(1986).
[8] Han X G, Wu Z S. Study of measuring method of surface roughness for metal base and coating[J]. Journal of Applied Optics, 17, 38-43(1996).
[9] Chang S P. Non-contact measurement method and system based on white light interference contour size and morphology[D]. Wuhan: Huazhong University of Science and Technology(2007).
[10] Caber P J. Interferometric profiler for rough surfaces[J]. Applied Optics, 32, 3438-3441(1993).
[13] Tong X L, Li Y H, Lin H S et al. Research on phase-shifting interferometry contrast three-dimensional topography of ultra precision surface[J]. Journal of Electronic Measurement and Instrument, 23, 65-69(2009).
[15] National Technical Committee for Standardization of Geometrical Product Specifications,. Terms,(2009).
[16] National Technical Committee for Standardization of Geometrical Product Specifications,(2011).
[17] International Organization for Standardization. Gaussian filters: ISO 16610-21-2011[S]. London: International Organization for Standardization(2011).
[18] National Technical Committee for Standardization of Geometrical Product Specifications,(2009).
[19] National Technical Committee for Standardization of Geometrical Product Specifications,. Nominal characteristic of contact (stylus)(2009).
Get Citation
Copy Citation Text
Ye Han, Weng Zuxin, Zhang Yunhai, Miu Jia, Xiao Yun. Surface Roughness Measurement Using Laser Confocal Microscope with Boundary Area Correction[J]. Laser & Optoelectronics Progress, 2020, 57(21): 211203
Category: Instrumentation, Measurement and Metrology
Received: Jan. 9, 2020
Accepted: --
Published Online: Oct. 27, 2020
The Author Email: Yunhai Zhang (zhangyh@sibet.ac.cn)