Laser & Optoelectronics Progress, Volume. 57, Issue 21, 211203(2020)
Surface Roughness Measurement Using Laser Confocal Microscope with Boundary Area Correction
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Ye Han, Weng Zuxin, Zhang Yunhai, Miu Jia, Xiao Yun. Surface Roughness Measurement Using Laser Confocal Microscope with Boundary Area Correction[J]. Laser & Optoelectronics Progress, 2020, 57(21): 211203
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jan. 9, 2020
Accepted: --
Published Online: Oct. 27, 2020
The Author Email: Yunhai Zhang (zhangyh@sibet.ac.cn)
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