Surface Roughness Measurement Using Laser Confocal Microscope with Boundary Area Correction

Table 1. Variance of actual contour and filtered contour treated by using two methods
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Table 1. Variance of actual contour and filtered contour treated by using two methods
Method Variance
Normal method 1.1082
Improved method 0.4231

Table 2. Selection criteria for sampling length l_r
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Table 2. Selection criteria for sampling length l_r
Roughness l_r /mm
0.02 mm≤R_a<0.10 mm 0.25
0.10 mm≤R_a<2.00 mm 0.80
2.00 mm≤R_a<10.00 mm 2.50
10.00 mm≤R_a<80.00 mm 8.00

Table 3. Selection criteria for cut-off wavelength
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Table 3. Selection criteria for cut-off wavelength
λ_c /mm λ_s /μm
0.25 2.5
0.8 2.5
2.5 8
8.0 25

Table 4. Roughness value R_a of smooth sample
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Table 4. Roughness value R_a of smooth sample
Method R_a /μm Averagevalue /μm Relativeerror /% RMSE
1 2 3 4 5 6 7 8
Normal method 2.86 2.88 2.87 2.86 2.87 2.85 2.84 2.86 2.86 2.72 0.080
Improved method 2.85 2.87 2.86 2.86 2.87 2.84 2.83 2.85 2.85 3.06 0.090

Table 5. Roughness value R_a of steep sample
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Table 5. Roughness value R_a of steep sample
Method R_a /μm Averagevalue /μm Relativeerror /% RMSE
1 2 3 4 5 6 7 8
Normal method 3.29 3.30 3.40 3.34 3.27 3.36 3.31 3.22 3.31 3.48 0.12
Improved method 3.17 3.22 3.23 3.19 3.16 3.25 3.20 3.10 3.19 0.31 0.045

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Ye Han, Weng Zuxin, Zhang Yunhai, Miu Jia, Xiao Yun. Surface Roughness Measurement Using Laser Confocal Microscope with Boundary Area Correction[J]. Laser & Optoelectronics Progress, 2020, 57(21): 211203

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