Acta Optica Sinica, Volume. 41, Issue 5, 0516004(2021)

InGaAs Surface Cleaning Based on Scanning Focused XPS Technique

Minmin Rong1, Yijun Zhang1、*, Shiman Li1, Gangcheng Jiao2, Weixin Liu3, Ziheng Wang1, Zhaoxin Shu1, and Yunsheng Qian1
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
  • 2Science and Technology on Low-Light-Level Night Vision Laboratory, Xi′an, Shaanxi 710065, China
  • 3No. 808 Institute, Shanghai Academy of Spacecraft Technology, Shanghai 201109, China
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    References(22)

    [6] Zhang Y J, Niu J, Zhao J et al. Influence of exponential-doping structure on photoemission capability of transmission-mode GaAs photocathodes[J]. Journal of Applied Physics, 108, 093108(2010).

    [7] Jin M C. Study of preparation and performance for near-infrared InGaAs photocathode[D]. Nanjing: Nanjing University of Science and Technology, 6-11(2016).

    [8] Wang W P, Ma J Y. Material and fabrication process of near infrared response III-V compound semiconductor photocathode[J]. Optoelectronic Technology, 33, 194-197, 207(2013).

    [17] Liu Z, Sun Y, Machuca F et al. Preparation of clean GaAs(100) studied by synchrotron radiation photoemission[J]. Journal of Vacuum Science & Technology A, 21, 212-218(2003).

    [19] Lee K N, Donovan S M, Gila B et al. Surface chemical treatment for the cleaning of AlN and GaN surfaces[J]. Journal of the Electrochemical Society, 147, 3087-3090(2000).

    [21] Hussey R J, Sproule G I. McCaffrey J P, et al. Characterization of oxides formed on InP, InGaAs, InAlAs, and InGaAs/InAlAs heterostructures at 300-500 ℃[J]. Oxidation of Metals, 57, 427-447(2002).

    [22] Ghosh S C, Biesinger M C. LaPierre R R, et al. The role of proximity caps during the annealing of UV-ozone oxidized GaAs[J]. Journal of Applied Physics, 101, 114321(2007).

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    Minmin Rong, Yijun Zhang, Shiman Li, Gangcheng Jiao, Weixin Liu, Ziheng Wang, Zhaoxin Shu, Yunsheng Qian. InGaAs Surface Cleaning Based on Scanning Focused XPS Technique[J]. Acta Optica Sinica, 2021, 41(5): 0516004

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    Paper Information

    Category: Materials

    Received: Sep. 3, 2020

    Accepted: Nov. 2, 2020

    Published Online: Apr. 7, 2021

    The Author Email: Zhang Yijun (zhangyijun423@126.co)

    DOI:10.3788/AOS202141.0516004

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