Acta Optica Sinica, Volume. 41, Issue 5, 0516004(2021)
InGaAs Surface Cleaning Based on Scanning Focused XPS Technique
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Minmin Rong, Yijun Zhang, Shiman Li, Gangcheng Jiao, Weixin Liu, Ziheng Wang, Zhaoxin Shu, Yunsheng Qian. InGaAs Surface Cleaning Based on Scanning Focused XPS Technique[J]. Acta Optica Sinica, 2021, 41(5): 0516004
Category: Materials
Received: Sep. 3, 2020
Accepted: Nov. 2, 2020
Published Online: Apr. 7, 2021
The Author Email: Zhang Yijun (zhangyijun423@126.co)