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Acta Optica Sinica, Volume. 41, Issue 5, 0516004(2021)

InGaAs Surface Cleaning Based on Scanning Focused XPS Technique

Minmin Rong1, Yijun Zhang1、*, Shiman Li1, Gangcheng Jiao2, Weixin Liu3, Ziheng Wang1, Zhaoxin Shu1, and Yunsheng Qian1
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
  • 2Science and Technology on Low-Light-Level Night Vision Laboratory, Xi′an, Shaanxi 710065, China
  • 3No. 808 Institute, Shanghai Academy of Spacecraft Technology, Shanghai 201109, China
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    Article index updated:May. 21, 2024

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    Minmin Rong, Yijun Zhang, Shiman Li, Gangcheng Jiao, Weixin Liu, Ziheng Wang, Zhaoxin Shu, Yunsheng Qian. InGaAs Surface Cleaning Based on Scanning Focused XPS Technique[J]. Acta Optica Sinica, 2021, 41(5): 0516004

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    Paper Information

    Category: Materials

    Received: Sep. 3, 2020

    Accepted: Nov. 2, 2020

    Published Online: Apr. 7, 2021

    The Author Email: Zhang Yijun (zhangyijun423@126.co)

    DOI:10.3788/AOS202141.0516004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology