Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Optica Sinica, Volume. 41, Issue 5, 0516004(2021)

InGaAs Surface Cleaning Based on Scanning Focused XPS Technique

Minmin Rong1, Yijun Zhang1、*, Shiman Li1, Gangcheng Jiao2, Weixin Liu3, Ziheng Wang1, Zhaoxin Shu1, and Yunsheng Qian1
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
  • 2Science and Technology on Low-Light-Level Night Vision Laboratory, Xi′an, Shaanxi 710065, China
  • 3No. 808 Institute, Shanghai Academy of Spacecraft Technology, Shanghai 201109, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (12)
    Equations (0)
    References (22)
    Cited By (2)
    Tools
    Paper Information
    Topics
    Figures & Tables(12)
    Surface SXI and optical microscope images for sample 1. (a) SXI image; (b) optical microscope image

    Fig. 1. Surface SXI and optical microscope images for sample 1. (a) SXI image; (b) optical microscope image

    Download full size
    XPS spectra of elements in micro-areas 1-1 and 1-2. (a) Ga2p3; (b) As2p3; (c) In3d

    Fig. 2. XPS spectra of elements in micro-areas 1-1 and 1-2. (a) Ga2p3; (b) As2p3; (c) In3d

    Download full size
    XPS fitted spectra of Ga2p3 for different samples. (a) Uncleaned sample; (b) sample 1; (c) sample 2; (d) sample 3

    Fig. 3. XPS fitted spectra of Ga2p3 for different samples. (a) Uncleaned sample; (b) sample 1; (c) sample 2; (d) sample 3

    Download full size
    XPS fitted spectra of As2p3 for different samples. (a) Uncleaned sample; (b) sample 1; (c) sample 2; (d) sample 3

    Fig. 4. XPS fitted spectra of As2p3 for different samples. (a) Uncleaned sample; (b) sample 1; (c) sample 2; (d) sample 3

    Download full size
    XPS fitted spectra of In3d for different samples. (a) Uncleaned sample; (b) sample 1; (c) sample 2; (d) sample 3

    Fig. 5. XPS fitted spectra of In3d for different samples. (a) Uncleaned sample; (b) sample 1; (c) sample 2; (d) sample 3

    Download full size
    XPS spectra of C1s and O1s for different samples. (a) C1s; (b) O1s

    Fig. 6. XPS spectra of C1s and O1s for different samples. (a) C1s; (b) O1s

    Download full size
    XPS spectra of C1s and O1s for different sample after different cleaning steps. (a) C1s; (b) O1s

    Fig. 7. XPS spectra of C1s and O1s for different sample after different cleaning steps. (a) C1s; (b) O1s

    Download full size
    XPS fitted spectra of Ga2p3 for sample 4 after different cleaning steps. (a) Uncleaning; (b) UV-ozone cleaning; (c) degreasing cleaning; (d) etching based on HCl and IPA mixed solution

    Fig. 8. XPS fitted spectra of Ga2p3 for sample 4 after different cleaning steps. (a) Uncleaning; (b) UV-ozone cleaning; (c) degreasing cleaning; (d) etching based on HCl and IPA mixed solution

    Download full size
    XPS fitted spectra of As2p3 for sample 4 after different cleaning steps. (a) Uncleaning; (b) UV-ozone cleaning; (c) degreasing cleaning; (d) etching based on HCl and IPA mixed solution

    Fig. 9. XPS fitted spectra of As2p3 for sample 4 after different cleaning steps. (a) Uncleaning; (b) UV-ozone cleaning; (c) degreasing cleaning; (d) etching based on HCl and IPA mixed solution

    Download full size
    XPS fitted spectra of In3d for sample 4 after different cleaning steps. (a) Uncleaning; (b) UV-ozone cleaning; (c) degreasing cleaning; (d) etching based on HCl and IPA mixed solution

    Fig. 10. XPS fitted spectra of In3d for sample 4 after different cleaning steps. (a) Uncleaning; (b) UV-ozone cleaning; (c) degreasing cleaning; (d) etching based on HCl and IPA mixed solution

    Download full size

    • Table 1. XPS fitted peak ratios of surface micro-area elements for different samplesunit: %

      View table

      Table 1. XPS fitted peak ratios of surface micro-area elements for different samplesunit: %

      SampleC1sO1Ga-InAsGa2O3As-InGaAsAs2O3In-GaAsIn2O3
      Uncleaned sample33.0540.167.725.581.621.125.043.082.64
      Sample 128.3119.9918.692.1812.0210.580.706.061.47
      Sample 228.1221.2019.084.2413.115.900.875.731.75
      Sample 328.7710.3222.182.3415.5511.480.348.280.74

    • Table 2. XPS fitted peak ratios of surface micro-area elements for different samples after different cleaning stepsunit: %

      View table

      Table 2. XPS fitted peak ratios of surface micro-area elements for different samples after different cleaning stepsunit: %

      SampleC1sO1sGa-InAsGa2O3As-InGaAsAs2O3As2O5In-GaAsIn2O3
      Uncleaned sample 433.0540.167.725.581.621.125.0403.082.64
      Sample 4 afterUV-ozone cleaning7.1062.942.2511.700.314.764.841.790.603.72
      Sample 4 afterdegreasing cleaning21.9349.584.8912.700.621.433.5001.034.34
      Sample 4 after solventetching by HCl and IPA15.918.7826.171.4121.0918.850.2807.200.31
      Sample 3 after solventetching by HCl and IPA28.7710.3222.182.3415.5511.480.3408.280.74
    Tools

    Get Citation

    Copy Citation Text

    Minmin Rong, Yijun Zhang, Shiman Li, Gangcheng Jiao, Weixin Liu, Ziheng Wang, Zhaoxin Shu, Yunsheng Qian. InGaAs Surface Cleaning Based on Scanning Focused XPS Technique[J]. Acta Optica Sinica, 2021, 41(5): 0516004

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Materials

    Received: Sep. 3, 2020

    Accepted: Nov. 2, 2020

    Published Online: Apr. 7, 2021

    The Author Email: Zhang Yijun (zhangyijun423@126.co)

    DOI:10.3788/AOS202141.0516004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology