Acta Optica Sinica, Volume. 44, Issue 7, 0712002(2024)

Phase Extraction Method for Single Interferogram Based on Light Intensity Iteration

Xiangyu Zhang, Ailing Tian, Zhiqiang Liu, Hongjun Wang, Bingcai Liu, and Xueliang Zhu*
Author Affiliations
  • School of Opto-Electronical Engineering, Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, Xi an Technological University, Xi an 710021, Shaanxi , China
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    Figures & Tables(10)
    Algorithm flow chart
    Original surface shape and simulated stripe pattern. (a) Original surface shape; (b) simulated corresponding interferogram
    Original phases. (a) Binary image; (b) wrapped phase of line 250; (c) unwrapping phase; (d) unwrapped phase of line 250
    Reconstructed phase maps. (a) Reconstructed phase of our method; (b) reconstructed phase of Fourier method
    Figures of impact of single noise on residual. (a) PV corresponding to single noise; (b) RMS corresponding to single noise
    Figures of impact of mixed noise on residual. (a) PV corresponding to mixed noise; (b) RMS corresponding to mixed noise
    Fringe patterns with different tilt coefficients. (a) Tilt coefficient is 5; (b) tilt coefficient is 10; (c) tilt coefficient is 15; (d) tilt coefficient is 20; (e) tilt coefficient is 25; (f) tilt coefficient is 30; (g) tilt coefficient is 35; (h) tilt coefficient is 40; (i) tilt coefficient is 45
    Residual varying with the second Zernike polynomial coefficient. (a) PV varying with the second Zernike polynomial coefficient; (b) RMS varying with the second Zernike polynomial coefficient
    Phase and residual plots measured in experiment. (a) Original interferogram; (b) phase obtained by ZYGO-Verifire PE phase-shifting interferometer; (c) phase obtained by our method; (d) phase residual
    • Table 1. PV and RMS values of phase and phase error

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      Table 1. PV and RMS values of phase and phase error

      ParameterPV /nmRMS /nm
      Phase by ZYGO-Verifire PEphase-shifting interferometer22.155.38
      Phase by our method22.785.51
      Phase error2.490.35
      Absolute error0.630.13
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    Xiangyu Zhang, Ailing Tian, Zhiqiang Liu, Hongjun Wang, Bingcai Liu, Xueliang Zhu. Phase Extraction Method for Single Interferogram Based on Light Intensity Iteration[J]. Acta Optica Sinica, 2024, 44(7): 0712002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 5, 2023

    Accepted: Jan. 10, 2024

    Published Online: Apr. 11, 2024

    The Author Email: Zhu Xueliang (zhuxueliang@xatu.edu.cn)

    DOI:10.3788/AOS231891

    CSTR:32393.14.AOS231891

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