Acta Optica Sinica, Volume. 44, Issue 7, 0712002(2024)
Phase Extraction Method for Single Interferogram Based on Light Intensity Iteration
Fig. 2. Original surface shape and simulated stripe pattern. (a) Original surface shape; (b) simulated corresponding interferogram
Fig. 3. Original phases. (a) Binary image; (b) wrapped phase of line 250; (c) unwrapping phase; (d) unwrapped phase of line 250
Fig. 4. Reconstructed phase maps. (a) Reconstructed phase of our method; (b) reconstructed phase of Fourier method
Fig. 5. Figures of impact of single noise on residual. (a) PV corresponding to single noise; (b) RMS corresponding to single noise
Fig. 6. Figures of impact of mixed noise on residual. (a) PV corresponding to mixed noise; (b) RMS corresponding to mixed noise
Fig. 7. Fringe patterns with different tilt coefficients. (a) Tilt coefficient is 5; (b) tilt coefficient is 10; (c) tilt coefficient is 15; (d) tilt coefficient is 20; (e) tilt coefficient is 25; (f) tilt coefficient is 30; (g) tilt coefficient is 35; (h) tilt coefficient is 40; (i) tilt coefficient is 45
Fig. 8. Residual varying with the second Zernike polynomial coefficient. (a) PV varying with the second Zernike polynomial coefficient; (b) RMS varying with the second Zernike polynomial coefficient
Fig. 9. Phase and residual plots measured in experiment. (a) Original interferogram; (b) phase obtained by ZYGO-Verifire PE phase-shifting interferometer; (c) phase obtained by our method; (d) phase residual
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Xiangyu Zhang, Ailing Tian, Zhiqiang Liu, Hongjun Wang, Bingcai Liu, Xueliang Zhu. Phase Extraction Method for Single Interferogram Based on Light Intensity Iteration[J]. Acta Optica Sinica, 2024, 44(7): 0712002
Category: Instrumentation, Measurement and Metrology
Received: Dec. 5, 2023
Accepted: Jan. 10, 2024
Published Online: Apr. 11, 2024
The Author Email: Zhu Xueliang (zhuxueliang@xatu.edu.cn)
CSTR:32393.14.AOS231891