Chinese Optics Letters, Volume. 1, Issue 10, 10616(2003)
Study on a MEMS silicon-based non-silicon mirror for an optical switch
[1] [1] L. Lin, E. L. Goldstein, and R. W. Tkach, IEEE Photon. Technol. Lett. 10, 525 (1998).
[2] [2] C. Marxer and N. F. de Rooij, J. Lightwave Technol. 17, 2 (1999).
[3] [3] S. S. Lee, L. S. Huang, C. J. Kim, and M. C. Wu, J. Lightwave Technol. 17, 7 (1999).
[4] [4] H. Toshiyoshi and H. Fujita, J. Microelectromechanical Systems 5, 231 (1996).
[5] [5] Y. Y. Wang, T. I. Kamins, and B. Y. Zhao, Polysilicon Film and its Application at IC (in Chinese) (Science in China Press, Beijing, 1988).
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Yuan Luo, Hongqiao Fu, Shanglian Huang, "Study on a MEMS silicon-based non-silicon mirror for an optical switch," Chin. Opt. Lett. 1, 10616 (2003)