Chinese Optics Letters, Volume. 1, Issue 10, 10616(2003)
Study on a MEMS silicon-based non-silicon mirror for an optical switch
A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10°at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.
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Yuan Luo, Hongqiao Fu, Shanglian Huang, "Study on a MEMS silicon-based non-silicon mirror for an optical switch," Chin. Opt. Lett. 1, 10616 (2003)
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