Measurement of the Electron Density of Capacitive-Coupled Plasma by Laser Thomson Scattering

Zeliang Zhang; Haiying Song; Shibing Liu

doi:10.3788/LOP57.231406

Laser & Optoelectronics Progress, Volume. 57, Issue 23, 231406(2020)

Measurement of the Electron Density of Capacitive-Coupled Plasma by Laser Thomson Scattering

Zeliang Zhang, Haiying Song^*, and Shibing Liu^*

Strong-Field and Ultrafast Photonics Laboratory, Key Laboratory of Trans-Scale Laser Manufacturing Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China

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Figures & Tables(4)

Fig. 1. Setup of laser Thomson scattering system

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Fig. 2. Physical picture of stable plasma generated by plasma generator

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Fig. 3. Laser Thomson scattering signal detected by APD

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Fig. 4. Electron density evolution curves

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Zeliang Zhang, Haiying Song, Shibing Liu. Measurement of the Electron Density of Capacitive-Coupled Plasma by Laser Thomson Scattering[J]. Laser & Optoelectronics Progress, 2020, 57(23): 231406

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Paper Information

Category: Lasers and Laser Optics

Received: Apr. 7, 2020

Accepted: May. 6, 2020

Published Online: Nov. 25, 2020

The Author Email: Haiying Song (hysong@bjut.edu.cn), Shibing Liu (hysong@bjut.edu.cn)

DOI:10.3788/LOP57.231406

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology