Patterning process of SiO2 film and fabrication of Si V-groove

Chinese Optics Letters, Volume. 8, Issue s1, 216(2010)

Jun’e Liu, Zhongda Guo, Weiguo Liu, and Huan Liu

Shaanxi Province Thin Film Technology and Optical Test Open Key Laboratory, Xi’an Technological University, Xi’an 710032, China

show less

References(5)

[1] [1] Y. Liu, C. Chen, G. Ding, and Y. Cui, J. Tianjin Univ. (in Chinese) 36, 409 (2003).

[2] [2] Y. Lei, Infrared and Laser Engineering (in Chinese) 31, 447 (2002).

[3] [3] C. Cai, R. Ma, W. Liu, H. Liu, and S. Zhou, Semicond. Optoelectron. (in Chinese) 30, 211 (2009).

[4] [4] G. Shen, C. Wu, P. Yao, X. Yang, X. Liu, P. Lu, and S. Gao, Chinese J. Sensors and Actuators (in Chinese)(2) 140 (2001).

[5] [5] C. Yang, Semicond. Optoelectron. (in Chinese) 21, 73 (2000).

Tools

Get Citation

Copy Citation Text

Jun’e Liu, Zhongda Guo, Weiguo Liu, Huan Liu, "Patterning process of SiO2 film and fabrication of Si V-groove," Chin. Opt. Lett. 8, 216 (2010)

Download Citation

Paper Information

Received: Dec. 2, 2009

Accepted: --

Published Online: May. 14, 2010

The Author Email:

Topics