Acta Optica Sinica, Volume. 44, Issue 23, 2323002(2024)

Design and Fabrication of Long-Wave Infrared Wide-Angle Metalens Arrays

Ran Wu1,2, Zongmin Ma1、*, and Wei Huang2、**
Author Affiliations
  • 1College of Mechanical Engineering, Dalian University, Dalian 116622, Liaoning , China
  • 2Suzhou Institute of Nano-Tech and Nano-Bionics Lightweight Laboratory, Chinese Academy of Sciences, Suzhou 215123, Jiangsu , China
  • show less
    Figures & Tables(9)
    Schematic of wide-angle imaging principle and device architecture for the metalens array. (a) Wide-angle imaging principle of the array; (b) overall device architecture schematic
    Schematic diagram of focusing off-axis light with metalens
    Schematic diagram of metalens and unit structure
    Transmittance distribution diagram of the unit structure when light is incident at 0°, 20°, and 30°
    Matching between the ideal phase curve of sub-lenses with different design angles and the phase provided by the unit structure. (a) Design angle is 0°; (b) design angle is 20°; (c) design angle is 30°
    Focused spot and focal plane intensity distribution on the XY plane of a metalens array sub lens at different incidence angles. (a) Focused spots and focal plane intensity distributions on the sub lens with a design angle of 0° at -15°, 0°, and 15° incidence angles, respectively; (b) focused spots and focal plane intensity distributions on the sub lens with a design angle of 20° at 15°, 20°, and 25° incidence angles, respectively; (c) focused spots and focal plane intensity distributions on the sub lens with a design angle of 30° at 25°, 30°, and 35° incidence angles, respectively
    Schematic diagrams of the metalens array. (a) Photo of the metalens array; (b) SEM images of the metalens array from different perspectives, with the left image corresponding to the top view SEM image of the metalens array, and the right image corresponding to the oblique view SEM image of the metalens array
    Experimental wide-angle imaging results of the metalens array. (a) Experimental device used to test the imaging performance of the metalens array; (b) imaging results of sub lenses with design angles of 0°, 20°, and 30°; (c) final imaging result of the metalens array through image stitching; (d) traditional metalens imaging results with limited field of view angles
    • Table 1. Diameter parameter of cylindrical unit structure

      View table

      Table 1. Diameter parameter of cylindrical unit structure

      Serial number1234567891011121314
      Diameter /μm3.01.01.51.71.92.02.12.22.32.42.52.62.82.9
    Tools

    Get Citation

    Copy Citation Text

    Ran Wu, Zongmin Ma, Wei Huang. Design and Fabrication of Long-Wave Infrared Wide-Angle Metalens Arrays[J]. Acta Optica Sinica, 2024, 44(23): 2323002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Optical Devices

    Received: Jul. 26, 2024

    Accepted: Aug. 23, 2024

    Published Online: Dec. 19, 2024

    The Author Email: Ma Zongmin (mzm9909@163.com), Huang Wei (whuang2008@sinano.ac.cn)

    DOI:10.3788/AOS241363

    CSTR:32393.14.AOS241363

    Topics