International Journal of Extreme Manufacturing, Volume. 3, Issue 3, 35202(2021)

Rapid subsurface damage detection of SiC using inductivity coupled plasma

Yi Zhan1...2, Linfeng Zhang1, Keyu Chen1, Dianzi Liu2, Dong Lu1 and Hui Deng1,* |Show fewer author(s)
Author Affiliations
  • 1Department of Mechanical and Energy Engineering, Southern University of Science and Technology, No. 1088, Xueyuan Road, Shenzhen, Guangdong 518055, People’s Republic of China
  • 2School of Engineering, Faculty of Science, University of East Anglia, Norwich Research Park, Norwich NR4 7TJ, United Kingdom
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    Yi Zhan, Linfeng Zhang, Keyu Chen, Dianzi Liu, Dong Lu, Hui Deng. Rapid subsurface damage detection of SiC using inductivity coupled plasma[J]. International Journal of Extreme Manufacturing, 2021, 3(3): 35202

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    Paper Information

    Received: Jan. 2, 2021

    Accepted: --

    Published Online: Jan. 10, 2022

    The Author Email: Deng Hui (dengh@sustech.edu.cn)

    DOI:10.1088/2631-7990/abff34

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