Fig. 1. Schematic diagrams of ptychography. (a) Imaging optical path; (b) overlapping of adjacent probes

Fig. 2. Sample recovered by 500 iterations of PIE under different overlap ratios. (a) Recovered sample at overlap ratio of 0.6; (b) recovered sample at overlap ratio of 0.7; (c) recovered sample at overlap ratio of 0.8; (d) recovered sample at overlap ratio of 0.9; (e) object; (f) error obtained by 500 iterations of PIE under different overlap ratios

Fig. 3. Sample recovered by 500 iterations of PIE under different position errors of probes. (a) Recovered sample at position error of 2 pixel; (b) recovered sample at position error of 4 pixel; (c) recovered sample at position error of 6 pixel; (d) recovered sample at position error of 9 pixel; (e) error obtained by 500 iterations of PIE under different position errors of probes

Fig. 4. Performance of integrated beam steering chip. (a) Layout of beam steering chip; (b) three-dimensional schematic diagram of emitter; (c) corresponding wavelength of 16 emitters; (d) schematic diagram of chip cross-sectional structure

Fig. 5. Optical path diagram of ptychography based on the integrated beam steering chip

Fig. 6. Experimental results. (a) 16 diffraction patterns recorded on CCD; (b) variation curve of error with iterations; (c) sample amplitude recovered by PIE algorithm; (d) sample phase recovered by PIE algorithm