Chinese Journal of Lasers, Volume. 41, Issue 7, 708006(2014)
Prediction Method and Measurement of the Depth of Subsurface Damage of Glass-Ceramic by Lapping Process
[1] [1] Camp D W, Kozlowski M R, Sheehan L M, et al.. Subsurface damage and polishing compound affect the 355-nm laser damage threshold of fused silica surfaces[C]. SPIE, 1998, 3244: 356-364.
[2] [2] Li S, Wang Z, Wu Y. Relationship between sub-surface damage and surface roughness of optical materials in grinding and lapping processes[J]. Journal of Materials Processing Technology, 2008, 205(1): 34-41.
[3] [3] Fine K R, Garbe R, Gip T, et al.. Non-destructive, real time direct measurement of subsurface damage[C]. SPIE, 2005, 5799: 105-110.
[4] [4] Feit M D, Rubenchik A M. Influence of subsurface cracks on laser induced surface damage[ C]. SPIE, 2004, 5273: 264-272.
[5] [5] Kamimura T, Akamatsu S, Yamamot O M, et al.. Enhancement of surf ace damage resistance by removing a subsurface damage in fused silica[C]. SPIE, 2004, 5273: 244-249.
[6] [6] Stolz C J, Menapace J A, Schaff ers K I, et al.. Laser damage initiation and growth of antireflection coated S-FAP crystal surfaces prepared by pitch lap and magnetorheological finishing[C]. SPIE, 2005, 5991: 449-455.
[7] [7] Mansurov G M, Mamedov R K, Sudarushkin A S, et al.. Study of the nature of A polished quart z-glass surface by ellipsometric and spectroscopic methods[J]. Optical Spectroscopy, 1982, 52(5): 509-513.
[9] [9] Li Shengyi, Wang Zhuo, Wu Yulie, et al.. Prediction theory and experiment of subsurface damage based on lapping processing parameters[J]. Journal of Mechanical Engineering. 2009, 45(2): 193-198.
[11] [11] Shen J, Liu SH H, Yi K, et al.. Subsurface damage in optical substrates[J]. Optik, 2005, 116(6): 288-294.
[12] [12] Papemory S, Schmid A W. Laser-introduced surface damage of optical materials: absorption sources, initiation, growth, and mitigation[C]. SPIE, 2008, 7132: 7132J.
[16] [16] Randi J A, Lambropoulos J C, Jacobs S D. Subsurface damage in some single crystalline optical materials[J]. Appl Opt, 2005, 44(12): 2241-2249.
[17] [17] Aleinikov F K. The effect of certain physical and mechanical properties on the grinding of brittle materials[J]. Sov Phys Tech Phys, 1957, 27: 2529-2538.
[18] [18] F Preston. Structune of abraded surface glasses[J]. Trans Opt Soc, 1992, 23(3): 141-162.
[19] [19] J C Lambropoulos. Subsurface damage in microgrinding optical glass[J]. Ceram Trans, 1998, 82: 469-474.
[20] [20] J C Lambropoulos, S D Jacobs, J Ruckman. Micromechanics of material remove mechanisms from brittle surface : subsurface damage and surface microroughness[J]. Ceram Tran, 1999.
[21] [21] B R Lawn, M V Swain. Microfracture beneath point indentations in brittle solids[J]. Journal of Materials Science, 1975, 10(1): 113-122.
[22] [22] J C Lambropoulos, S D Jacobs, J Ruckman. Material removal mechanisms from grinding to polishing[J]. Ceram Trans, 1999, 102: 113-128.
[23] [23] B R Lawn, A G Evans, D B Marshall. Elastic/plastic indentation damage in ceramics: the median/radial crack system[J]. J Am Ceram Soc, 1980, 63(9-10): 574-581.
[24] [24] J C Conway, H P Kirchner. The mechanics of crack initiation and propagation beneath a moving sharp indentor[J]. Journal of Materials Science,1980, 15(11): 2879- 2883.
[25] [25] T Mahmoud, J Tamaki, J Yan. Three-dimensional shape modeling of diamond abrasive grains measured by a scanning laser microscope[J]. Key Eng Mater, 2003, 238-239: 131-136.
[26] [26] M T Laugier. The elastic/plastic indentation of ceramics[J]. J Mater Sci Lett, 1985, 4(12): 1539-1541.
[27] [27] Viens M J. Fracture Toughness and Crack Growth of Zerodur[R]. NASA, 1990.
Get Citation
Copy Citation Text
Xiang Yong, Ren Jie, Bai Manshe, Chen Jing, Zhang Jinkuan. Prediction Method and Measurement of the Depth of Subsurface Damage of Glass-Ceramic by Lapping Process[J]. Chinese Journal of Lasers, 2014, 41(7): 708006
Category: measurement and metrology
Received: Jan. 3, 2014
Accepted: --
Published Online: Jun. 24, 2014
The Author Email: Yong Xiang (583002725@qq.com)