Piezoelectrics & Acoustooptics, Volume. 46, Issue 5, 741(2024)
Research on a Four-Legged Piezoelectric Mobile Robot Based on Inertial Actuation
In this study, based on the modular design concept, an L-type piezoelectric actuator is applied to the development of a piezoelectric mobile robot. The mobile robot is composed of four circumferentially distributed L-type piezoelectric actuators and connecting platforms. This contribution representsa simple and compact structuredesigned to achieve a significant range of high-precision motion in a 2-DOF plane. The mobile robot was processed and assembled, and a test platform was developed to investigate its motion output characteristics. Experimental results demonstratedthat the proposed mobile robot showed a good comprehensive performance including high precision, speed, and stability, and strong carrying capacity. Its motion resolution, maximum motion speed, and carrying capacitywere 1 μm, 46 mm/s, and 75 g, respectively. Finally, the proposed mobile robot has broad application prospects in terms of micro and nano operations, wafer defect detection, and ultra-precision machining.
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LI Yunfei, ZHU Xijing, LI Jing, GAO Guodong. Research on a Four-Legged Piezoelectric Mobile Robot Based on Inertial Actuation[J]. Piezoelectrics & Acoustooptics, 2024, 46(5): 741
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Received: May. 21, 2024
Accepted: Jan. 17, 2025
Published Online: Jan. 17, 2025
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