Fig. 1. Schematics of experimental setup. (a) Ti∶sapphire light source system; (b) beam stability control system; (c) EUV generation and filtration system; (d) EUV light source detection and spectrometer system

Fig. 2. Schematics of high-order harmonic optical power measurement. (a) EUV light power measurement system and pointing stability measurement system; (b) harmonic spot collected at 1.9 m from light source

Fig. 3. Power stability and pointing stability test results. (a) Average power curve of beam within 12 h; (b) coordinate of center of HHG spot collected by CMOS

Fig. 4. Results of spectral acquisition and analysis. (a) Schematic of spectral acquisition device; (b) spectral calibration analysis results of gratings with groove density of 500 line/mm

Fig. 5. Grating spectral results. (a) First-order spectral information collected by CMOS; (b) extracted first-order spectral information

Fig. 6. HHG spectral distributions acquired by grating with groove density of 500 line/mm. (a) Theoretical absolute grating efficiency; (b) harmonic spectra obtained from measurement