Acta Photonica Sinica, Volume. 51, Issue 12, 1216001(2022)

Research on Improving the Uniformity of Optical Communication Filter Film by Ion Beam Etching

Jing ZHANG1, Haicheng LIU1、*, Xiuhua FU1,2, Shengqi WANG3, and Fei YANG4
Author Affiliations
  • 1College of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China
  • 2Zhongshan Research Institute,Changchun University of Science and Technology,Zhongshan,Guangdong 528436,China
  • 3Guang Chi Technology(Shanghai)Co.,Ltd.,Shanghai 200444,China
  • 4Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China
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    References(15)

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    [4] ZHANG Jinbao, WANG Minghui, GENG Hao et al. Process technology for preparing narrow-band filter film system by time monitoring method[J]. Journal of Shaanxi University of Science and Technology (Natural Science Edition), 35, 12-16(2019).

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    [15] TANG Haolong, FU Xiuhua, LIU Guojun et al. Development of low-loss optical filter for torpedo optical fiber guidance system[J]. Acta Photonica Sinica, 42, 1289-1294(2013).

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    Jing ZHANG, Haicheng LIU, Xiuhua FU, Shengqi WANG, Fei YANG. Research on Improving the Uniformity of Optical Communication Filter Film by Ion Beam Etching[J]. Acta Photonica Sinica, 2022, 51(12): 1216001

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    Paper Information

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    Received: Mar. 25, 2022

    Accepted: May. 17, 2022

    Published Online: Feb. 6, 2023

    The Author Email: Haicheng LIU (Liuhaicheng2022@163.com)

    DOI:10.3788/gzxb20225112.1216001

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