Journal of Synthetic Crystals, Volume. 50, Issue 9, 1774(2021)
Eccentric Balance of Improved Single Crystal Furnace Lifting System
References(5)
[2] [2] KALAEV V, SATTLER A, KADINSKI L. Crystal twisting in Cz Si growth［J］. Journal of Crystal Growth, 2015, 413: 12-16.
[5] [5] TEAL G K, Little J B. Growth of germanium single crystals［J］.Physical Review,1950,78(5):647-647.
[6] [6] GEVELBER M A, WARGO M J, STEPHANOPOULOS G. Advanced control design considerations for the Czochralski process［J］. Journal of Crystal Growth, 1987, 85(1/2): 256-263.
[7] [7] BARDSLEY W, HURLE D T J, JOYCE G C. The weighing method of automatic Czochralski crystal growth: i. Basic theory［J］. Journal of Crystal Growth, 1977, 40(1): 13-20.
[8] [8] TAKANO K, SHIRAISHI Y, MATSUBARA J, et al. Global simulation of the Cz silicon crystal growth up to 400 mm in diameter［J］. Journal of Crystal Growth, 2001, 229(1/2/3/4): 26-30.
Tools
Get Citation
Copy Citation Text
WANG Wei, HUANG Ming, CHANG Xiaoyu, ZHANG Hao, WU Qi, LONG Lianchun. Eccentric Balance of Improved Single Crystal Furnace Lifting System[J]. Journal of Synthetic Crystals, 2021, 50(9): 1774
Paper Information
Category:
Received: Dec. 4, 2020
Accepted: --
Published Online: Nov. 8, 2021
The Author Email:
CSTR:32186.14.
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20