Laser & Optoelectronics Progress, Volume. 60, Issue 21, 2100004(2023)

Two-Dimensional Metasurface: Application and Research Progress of Metalenses

Jianxiong Tang, Yandong Gong*, and Kai Pang
Author Affiliations
  • School of Instrument Science and Optoelectronic Engineering, Beijing Information Science and Technology University, Beijing 100192, China
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    Figures & Tables(19)
    Principle diagram of changing spherical lens into plane lens
    Light path diagram of Fresnel lens
    Schematic diagram of structure of this review
    Optical path diagram of generalized Snell refraction
    Optical path diagram of generalized Snell reflection
    Plasmonic metalens based on propagation phase.(a) Schematic of SPP formation;(b) propagation mode of SPP in air slit[4];(c) schematic of nanoslit arrays with different widths formed on metal films[5];(d) metalens structure and simulation results based on nanoscale slit array[6]
    Plasmonic metalens based on resonance phase. (a) Finite-difference time-domain (FDTD) simulations of scattered electric field for individual antennas composing array[2]; (b) FDTD simulation results of phase shifts and scattering amplitudes in cross-polarization for eight elements used in metalens[9]; (c) scanning electron microscope (SEM) image of metalens[9]; (d) schematic designs and results of full-wave simulations of Babinet-inverted nano-antennas[11]; (e) schematic of MIM unit structure[12]
    Plasmonic metalens based on geometric phase. (a) Schematic of U-shaped aperture antenna[14]; (b) schematic of rectangular antenna[15]; (c) SEM images of catenary arrays for metalens[16]; (d) scaled view of rectangular region in (c)[16]
    Dielectric metalens based on propagation phase. (a) Schematic of dielectric waveguide phase modulation[17]; (b) schematic three-dimensional view of an amorphous silicon post and its magnified top view[18]; (c) functional relation of cylinder diameter and phase modulation[19]; (d) schematic of a metalens operating in transmission mode[19]
    Dielectric metalens based on resonance phase. (a) Field distributions for electric and magnetic dipoles[23]; (b) SEM images of top view of a mid-infrared Huygens metalens structure[24]; (c) mechanisms for realizing a 2π phase shift by functional relationship between wavelength and phase response period[22]; (d) F-P resonance based lens with square-shaped holes[26]
    Dielectric metalens based on geometric phase. (a) Schematic of metalens structure[31]; (b) illustration of multidimensional manipulation based on photonic spin Hall effect[32]
    Tunable metalens. (a) Schematic of concept of tunable metalens[36]; (b) schematic of migration of silver ions and formation of silver filaments[38]; (c) schematic of liquid crystals in off-state and on-state[40]; (d) schematic of tunable metalens system[41]
    Monochromatic aberration cancellation metalens. (a) Perfect flat lens transforms plane waves with any angle of incidence into spherical waves, which converge to a focal point on focal plane[50]; (b) schematic of metalens structure[51]; (c) schematic of design of flat metalenses and axicons[9]; (d) schematic of metalens patterned on a spherical interface[52]
    Broadband achromatic metalens. (a) SEM image of metalens[55]; (b) schematic of a metalens element[56]; (c) layout of a quadrant of metalens[57]; (d) schematic of overall optical structure of metacorrector[61]; (e) SEM image of achromatic metalens array (left) and zoomed-in SEM image of a single metalens in square (right)[62]; (f) composition principle of retroreflector[65]; (g) schematic of overall structure and unit structure of metalens[66]
    • Table 1. Parameter characteristics of plasmonic metalenses

      View table

      Table 1. Parameter characteristics of plasmonic metalenses

      StructureMaterialWavelength /nmPhase modeNumerical aperture (NA)Efficiency /%Reference
      NanoslitAg650Propagation phase4
      NanoslitAg650Propagation phase0.9560.285
      NanoslitAu850Propagation phase0.356
      AntennaAu1550Resonance phase0.0150.07510109
      Inverted antennaAu676Resonance phase0.5711
      MIMAu750-950Resonance phase0.732712
      MIMAu4600Resonance phase0.028013
      AntennaAu740Geometric phase15
      CatenaryAu532-780Geometric phase5016
    • Table 2. Parameter characteristics of dielectric metalenses

      View table

      Table 2. Parameter characteristics of dielectric metalenses

      StructureMaterialWavelength /nmPhase modeNAEfficiency /%Reference
      Elliptic columna-Si915Propagation phase8018
      ColumnTiO2

      660

      532

      405

      Propagation phase

      0.85

      0.60

      60

      90

      19
      ColumnSi1550Propagation phase2520
      Square columnPbTe5100‒5290Resonance phase0.718024
      Square columnSI980Geometric phase5832
      Square columnGaN

      430

      532

      633

      Geometric phase0.22

      87

      91.6

      50.6

      33
    • Table 3. Parameter characteristics of tunable metalenses

      View table

      Table 3. Parameter characteristics of tunable metalenses

      Modulation modeWavelength /nmFocal length /μmFocusing efficiency /%Reference
      Heat modulation9000110‒10006035
      Heat modulation632600‒6907636
      1000‒102367
      Electric modulation15001.5, 2, 339
      Electric modulation65010, 20.25

      40

      70

      40
      10, 28.68
      10, 37.41
      10, 45.68
      Mechanical modulation15503.75×106‒15×1065741
      Mechanical modulation65840, 8023.0‒35.142
      Mechanical modulation63337.9, 94.832.9243
      Mechanical modulation15503000‒540005444
      Mechanical modulation

      450

      550

      650

      212‒257

      252‒306

      310‒376

      45
      Mechanical modulation915565‒6294046
    • Table 4. Parameter characteristics of monochromatic aberration cancellation metalenses

      View table

      Table 4. Parameter characteristics of monochromatic aberration cancellation metalenses

      Wavelength /μmNAFocal lengthFocusing efficiency /%Reference
      300000.4550
      0.85717 μm7051
      1.553 cm109
      6 cm
      1.550.552
      1.35‒1.95

      Transmission 22 μm

      Reflection 11 μm

      16‒6153
    • Table 5. Parameter characteristics of broadband achromatic metalenses

      View table

      Table 5. Parameter characteristics of broadband achromatic metalenses

      Wavelength /nmNAFocal length /μmFocusing efficiency /%Reference
      1200‒16800.2681001255
      470‒6700.2632056
      1300‒16500.242005058
      1200‒16500.13800
      1200‒14000.8830
      460‒7000.0759.963561
      460‒7000.2603057
      400‒6600.21574939.162
      3.8×105‒1×1060.385120006859
      1350‒19502265
      450‒14000.107467066
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    Jianxiong Tang, Yandong Gong, Kai Pang. Two-Dimensional Metasurface: Application and Research Progress of Metalenses[J]. Laser & Optoelectronics Progress, 2023, 60(21): 2100004

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    Paper Information

    Category: Reviews

    Received: Sep. 22, 2022

    Accepted: Nov. 8, 2022

    Published Online: Oct. 26, 2023

    The Author Email: Yandong Gong (eydong@bistu.edu.cn)

    DOI:10.3788/LOP222602

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