Interferometric Measurement of Optical Aspheric Surface Form Error and Parameter Error

Qun Hao; Yiming Liu; Yao Hu; Yan Ning; Zichen Wang; Chuheng Xu; Xinyu Dong; Yuanheng Liu

doi:10.3788/AOS230962

Acta Optica Sinica, Volume. 43, Issue 15, 1522003(2023)

Interferometric Measurement of Optical Aspheric Surface Form Error and Parameter Error

Qun Hao^*, Yiming Liu, Yao Hu^**, Yan Ning, Zichen Wang, Chuheng Xu, Xinyu Dong, and Yuanheng Liu

Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China

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Qun Hao, Yiming Liu, Yao Hu, Yan Ning, Zichen Wang, Chuheng Xu, Xinyu Dong, Yuanheng Liu. Interferometric Measurement of Optical Aspheric Surface Form Error and Parameter Error[J]. Acta Optica Sinica, 2023, 43(15): 1522003

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Paper Information

Category: Optical Design and Fabrication

Received: May. 10, 2023

Accepted: Jun. 25, 2023

Published Online: Aug. 3, 2023

The Author Email: Hao Qun (qhao@bit.edu.cn), Hu Yao (huy08@bit.edu.cn)

DOI:10.3788/AOS230962

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