Researching | Study on Surface Activation Treatment of Au‑Au Thin Film Bonding at Low Temperature in Atmospheric Atmosphere

Optoelectronic Technology, Volume. 43, Issue 1, 42(2023)

Study on Surface Activation Treatment of Au‑Au Thin Film Bonding at Low Temperature in Atmospheric Atmosphere

Kongjie CHEN¹, Junyang NIE¹, Canlin LUO¹, Xiongtu ZHOU^1,2, Jie SUN^1,2, Qun YAN^1,2, Chaoxing WU^1,2, and Yongai ZHANG^1,2、*

Author Affiliations

¹College of Physics and Information Engineering, Fuzhou University, Fuzhou35008, CHN

²Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou350108, CHN

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Figures & Tables(8)

Fig. 1. Flow chart of Au‑Au thin film bonding

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Fig. 2. RMS of Au film versus time of surface‑activation treatment

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Fig. 3. AFM topography of Au thin films

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Fig. 4. SEM images of Au‑Au bonding

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Fig. 5. Shear force test results

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Fig. 6. Surface morphology of Au film after destructive test

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Fig. 7. Diagram of surface Au atomic diffusion

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Table 1. Process parameters of surface activation treatment process parameters
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Table 1. Process parameters of surface activation treatment process parameters
样品序号功率/W 压强/Pa 时间/min
样品1# 200 43 0
样品2# 200 43 10
样品3# 200 43 20
样品4# 200 43 40

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Kongjie CHEN, Junyang NIE, Canlin LUO, Xiongtu ZHOU, Jie SUN, Qun YAN, Chaoxing WU, Yongai ZHANG. Study on Surface Activation Treatment of Au‑Au Thin Film Bonding at Low Temperature in Atmospheric Atmosphere[J]. Optoelectronic Technology, 2023, 43(1): 42

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Paper Information

Category: Research and Trial-manufacture

Received: Jun. 29, 2022

Accepted: --

Published Online: Apr. 14, 2023

The Author Email: ZHANG Yongai (yazhang@fzu.edu.cn)

DOI:10.19453/j.cnki.1005-488x.2023.01.007

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology