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Acta Optica Sinica, Volume. 43, Issue 22, 2205003(2023)

Design of Total Internal Reflection Immersed Gratings with High Diffraction Efficiency and Low Polarization Sensitivity

Huiying Chen1,2,3, Xinhua Chen1,2,3、*, Qiao Pan1,2,3, Jiacheng Zhu1,2,3, and Weimin Shen1,2,3
Author Affiliations
  • 1School of Optoelectronic Science and Engineering, Soochow University, Suzhou 215006, Jiangsu , China
  • 2Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Suzhou 215006, Jiangsu , China
  • 3Key Lab of Modern Optical Technologies of Education Ministry of China, Suzhou 215006, Jiangsu , China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (19)
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    References (19)
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    Figures & Tables(19)
    Schematic diagram of immersed grating

    Fig. 1. Schematic diagram of immersed grating

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    Schematic diagram of grating groove structure

    Fig. 2. Schematic diagram of grating groove structure

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    Grating initial structure diffraction efficiency and polarization sensitivity curve. (a) Diffraction efficiency; (b) polarization sensitivity

    Fig. 3. Grating initial structure diffraction efficiency and polarization sensitivity curve. (a) Diffraction efficiency; (b) polarization sensitivity

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    Diffraction efficiency and polarization sensitivity at different nano laminate thicknesses. (a) Diffraction efficiency; (b) polarization sensitivity

    Fig. 4. Diffraction efficiency and polarization sensitivity at different nano laminate thicknesses. (a) Diffraction efficiency; (b) polarization sensitivity

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    Diffraction efficiency and polarization sensitivity at different refractive indices of nano laminate for the grating groove depth of 248 nm. (a) Refractive index is 2.3; (b) refractive index is 2

    Fig. 5. Diffraction efficiency and polarization sensitivity at different refractive indices of nano laminate for the grating groove depth of 248 nm. (a) Refractive index is 2.3; (b) refractive index is 2

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    Diffraction efficiency and polarization sensitivity at different refractive indices of nano laminate for the grating groove depth of 268 nm. (a) Refractive index is 2; (b) refractive index is 2.1

    Fig. 6. Diffraction efficiency and polarization sensitivity at different refractive indices of nano laminate for the grating groove depth of 268 nm. (a) Refractive index is 2; (b) refractive index is 2.1

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    Nano laminate structure

    Fig. 7. Nano laminate structure

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    Diffraction efficiency and polarization sensitivity of grating after five-layer film stacking. (a) Diffraction efficiency;(b) polarization sensitivity

    Fig. 8. Diffraction efficiency and polarization sensitivity of grating after five-layer film stacking. (a) Diffraction efficiency;(b) polarization sensitivity

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    Average diffraction efficiency at different depth to period ratios and duty cycles

    Fig. 9. Average diffraction efficiency at different depth to period ratios and duty cycles

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    Polarization sensitivity at different depth to period ratios and duty cycles

    Fig. 10. Polarization sensitivity at different depth to period ratios and duty cycles

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    Tolerance of depth to period ratio and duty cycle when diffraction efficiency decreases is less than 10%

    Fig. 11. Tolerance of depth to period ratio and duty cycle when diffraction efficiency decreases is less than 10%

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    Tolerances of depth to period ratio and duty cycle when polarization sensitivity is less than 1%

    Fig. 12. Tolerances of depth to period ratio and duty cycle when polarization sensitivity is less than 1%

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    Tolerance of depth to period ratio and duty cycle tolerances of the grating

    Fig. 13. Tolerance of depth to period ratio and duty cycle tolerances of the grating

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    • Table 1. Main optical parameters of immersed grating

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      Table 1. Main optical parameters of immersed grating

      ParameterValue
      Wavelength /nm750-770
      Groove density /（lp·mm-1）3550
      Diffraction order-1
      Incidence angle /（°）71.4
      Substrate materialFused silica

    • Table 2. Grating initial structure parameters

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      Table 2. Grating initial structure parameters

      ParameterValue
      Duty cycle0.3
      Groove depth /nm250
      Nano laminate thickness /nm43
      Refractive index of nano laminate n2

    • Table 3. Diffraction efficiency and polarization sensitivity under different duty cycles and nano laminate thicknesses after screening

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      Table 3. Diffraction efficiency and polarization sensitivity under different duty cycles and nano laminate thicknesses after screening

      Duty cycleNano laminate thickness /nmAverage efficiency /%Polarization sensitivity /%
      0.124398.730.11
      0.144298.250
      0.164297.140.25
      0.184195.960.20
      0.204193.650.20
      0.224190.350.40

    • Table 4. Optimized immersed grating structure parameters

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      Table 4. Optimized immersed grating structure parameters

      ParameterValue
      Wavelength /nm750-770
      Groove density /（lp·mm-1）3550
      Diffraction order-1
      Incidence angle /（°）71.4
      Duty cycle0.14
      Groove depth /nm248
      Nano laminate thickness/nm42
      Refractive index of nano laminate n2
      Substrate materialFused silica

    • Table 5. Nano laminate design results

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      Table 5. Nano laminate design results

      ParameterValue
      Number of layers of film system5
      Film system structureAl2O3-TiO2-Al2O3-TiO2-Al2O3
      Nano laminate total thickness /nm55
      Refractive index of nano laminate n2
      Thickness of each layer of film /nm11-11-11-11-11

    • Table 6. Manufacturing tolerances of immersed grating

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      Table 6. Manufacturing tolerances of immersed grating

      ParameterValue
      Tolerances of duty cycle-0.08-+0.32
      Tolerances of depth to period ratio-0.02-+0.12
      Tolerance of Al2O3/nm-6
      Tolerance of TiO2/nm±6
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    Huiying Chen, Xinhua Chen, Qiao Pan, Jiacheng Zhu, Weimin Shen. Design of Total Internal Reflection Immersed Gratings with High Diffraction Efficiency and Low Polarization Sensitivity[J]. Acta Optica Sinica, 2023, 43(22): 2205003

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    Paper Information

    Category: Diffraction and Gratings

    Received: May. 24, 2023

    Accepted: Jul. 25, 2023

    Published Online: Nov. 8, 2023

    The Author Email: Chen Xinhua (xinhua_chen@suda.edu.cn)

    DOI:10.3788/AOS231040

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology