Fig. 1. Structure diagram of thin-film fiber-optic F-P pressure sensor

Fig. 2. Thin-film fiber-optic F-P pressure sensor. (a) Optical micrograph of sensor head (side view); (b) physical photograph of thin-film fiber-optic F-P pressure sensor

Fig. 3. Two-dimensional equivalent model

Fig. 4. Simulation process

Fig. 5. Electromagnetic energy distributions of sensor at different wavelengths. (a) At wavelength of 1600 nm; (b) at wavelength of 1543 nm; (c) at wavelength of 1535.6 nm

Fig. 6. Reflection spectrum of sensor

Fig. 7. Simulation diagram of thin-film fiber-optic F-P pressure sensor structure model under pressure. (a) Pressure deformation diagram of sensor structure; (b) three-dimensional observation diagram of sensor under pressure

Fig. 8. F-P cavity length variations of sensors under different pressure loads

Fig. 9. Resonance frequency of sensor

Fig. 10. Experimental system for pressure testing

Fig. 11. Reflection spectrum of thin-film fiber-optic F-P pressure sensor without pressure loading

Fig. 12. Reflection spectra of thin-film fiber-optic F-P pressure sensor under different pressures

Fig. 13. Relationship between pressure and wavelength of thin film fiber-optic F-P pressure sensor

Fig. 14. Schematic diagram of dynamic pressure measuring experimental setup

Fig. 15. Shock wave pressure signal