Formation and microstructure of silicon film deposited by laser light

Chinese Journal of Lasers, Volume. 15, Issue 5, 306(1988)

Yang Jingran

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[in Chinese]

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References(3)

[1] [1] Dubowski J J, Williams D F. Appl. Phys. Lett., 1984; 44(3): 339

[4] [4] Liu Y S, Chiang S W. Appl. Phys. Lett, 1981; 38(12): 1005

[5] [5] Oriowski Τ Ε, Hichfcer Η. Appl. Phys. Lett., 1984; 45(3): 241

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Yang Jingran. Formation and microstructure of silicon film deposited by laser light[J]. Chinese Journal of Lasers, 1988, 15(5): 306

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Paper Information

Category: laser devices and laser physics

Received: Feb. 2, 1987

Accepted: --

Published Online: Aug. 13, 2012

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