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Acta Optica Sinica, Volume. 34, Issue 3, 312003(2014)

Calibration of Spectroscopic Ellipsometer Using Multiple Standard Samples

Song Guozhi1,2、*, Liu Tao2, Chen Yaqin2, Li Guoguang2, and Wang Jiandong1
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    Song Guozhi, Liu Tao, Chen Yaqin, Li Guoguang, Wang Jiandong. Calibration of Spectroscopic Ellipsometer Using Multiple Standard Samples[J]. Acta Optica Sinica, 2014, 34(3): 312003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Aug. 30, 2013

    Accepted: --

    Published Online: Jan. 23, 2014

    The Author Email: Guozhi Song (gzsong1125@gmail.com)

    DOI:10.3788/aos201434.0312003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology