Journal of Synthetic Crystals, Volume. 51, Issue 12, 2131(2022)

Fabrication and Characterizations of 8Inch n Type 4H-SiC Single Crystal Substrate

LOU Yanfang*, GONG Tuochen, ZHANG Wen, GUO Yu, PENG Tonghua, YANG Jian, and LIU Chunjun
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    LOU Yanfang, GONG Tuochen, ZHANG Wen, GUO Yu, PENG Tonghua, YANG Jian, LIU Chunjun. Fabrication and Characterizations of 8Inch n Type 4H-SiC Single Crystal Substrate[J]. Journal of Synthetic Crystals, 2022, 51(12): 2131

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    Paper Information

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    Received: Dec. 5, 2022

    Accepted: --

    Published Online: Feb. 18, 2023

    The Author Email: LOU Yanfang (louyanfang@tankeblue.com)

    DOI:

    CSTR:32186.14.

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