Chinese Optics Letters, Volume. 6, Issue 3, 03228(2008)

Influences of SiO2 protective layers and annealing on the laser-induced damage threshold of Ta2O5 films

Cheng Xu1,2, Hongcheng Dong1,2, Jianyong Ma1,2, Yunxia Jin1, Jianda Shao1, and Zhengxiu Fan1
Author Affiliations
  • 1R and D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
  • 2Graduate University of Chinese Academy of Sciences, Beijing 100049
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    CLP Journals

    [1] Tao Chunxian, Li Xia, Li Dawei, He Hongbo, Shao Jianda. Research of Modulation Frequency in Surface Thermal Lens Technique for Coatings Weak Absorption Measurement[J]. Acta Optica Sinica, 2010, 30(2): 609

    [2] Hao Liu, Ping Ma, Yunti Pu, Zuzhen Zhao. Impact of annealing on laser resistance of HfO2 films fabricated byALD, IBS and EBE techniques[J]. High Power Laser and Particle Beams, 2020, 32(7): 071002

    [3] Jianing Dong, Jie Fan, Sida Mao, Yunping Lan, Yonggang Zou, Haizhu Wang, Jiabin Zhang, Xiaohui Ma, "Effect of annealing on the damage threshold and optical properties of HfO2/Ta2O5/SiO2 high-reflection film," Chin. Opt. Lett. 17, 113101 (2019)

    [4] Xiaofeng Liu, Dawei Li, Yuan'an Zhao, Xiao Li, Xiulan Ling, Jianda Shao, "The mulDamage characteristics of HfO2/SiO2 high reflector at 45° incidence in 1-on-1 and N-on-1 tests," Chin. Opt. Lett. 8, 41 (2010)

    [5] Chunxian Tao, Yuanan Zhao, Hongbo He, Dawei Li, Jianda Shao, Zhengxiu Fan, "Imaging photothermal microscopy for absorption measurements of optical coatings," Chin. Opt. Lett. 7, 1061 (2009)

    [6] Tao Chunxian, Zhao Yuan′an, He Hongbo, Shao Jianda. Multi-Channel Absorption Measurement of Optical Coatings Based on Image Lock-in Technique[J]. Acta Optica Sinica, 2009, 29(8): 2333

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    Cheng Xu, Hongcheng Dong, Jianyong Ma, Yunxia Jin, Jianda Shao, Zhengxiu Fan, "Influences of SiO2 protective layers and annealing on the laser-induced damage threshold of Ta2O5 films," Chin. Opt. Lett. 6, 03228 (2008)

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    Paper Information

    Received: Aug. 20, 2007

    Accepted: --

    Published Online: Mar. 27, 2008

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