Chinese Journal of Liquid Crystals and Displays, Volume. 38, Issue 8, 1062(2023)
Research progress of graphene pressure sensors in wearable electronic devices
Fig. 2. Manufacturing process of LC-MEMS pressure sensor. (a) Silicon substrate; (b) KOH etching and PMMA/Gr film transfer; (c) Upper plate aluminum sputtering; (d) Glass substrate; (e) Sputtering and curing of microcoils; (f) Silicon-glass bonding[20].
Fig. 3. (a) Process of graphene-based sensors with paper substrate[32]; (b) Biological microstructure of the human epidermis, and the spines beneath the epidermis being a key factor in high sensitivity;(c) Surface of the spinous body shown by epidermal microscope; (d) Three-dimensional morphology of sandpaper; (e) Manufacturing process of graphene pressure sensors; (f) Optical micrographs of patterned PDMS; (g) Optical micrograph of GO coating on PDMS; (h) Optical micrograph of No.150 sandpaper after high temperature reduction[40].
Fig. 4. (a) Preparation process of biomimetic porous graphene-SBR pressure sensor; (b,c) Folded and twisted photos of biomimetic porous graphene-SBR pressure sensor; (d) Photo of biomimetic porous graphene-SBR pressure sensor[45].
Fig. 7. Characteristic description of pressure response. (a) I-V curves under different pressures; (b) Relative conductivity changes with pressure, the dotted line is the fitting result;(c) Response to pulse pressure, the response rise time (tr) was 2 μs, and the relaxation decline time (tf) was 3 μs; (d) Stability of pressure response during 4 000 cycles of loading-unloading at a pressure of 28 Pa, the operating voltage was 5 V[9].
Fig. 9. Schematic diagram of structure and mechanis of reduced GO textiles deposited by electrostatic discharge[68]
Fig. 10. A sensor attached to the femur joint of the toy robot monitors the response of the sensor through wireless communication on the mobile phone when the sensor is touched by the hand[73]
Fig. 11. Dynamic response of GO/Gr composite films. (a) Response of output current under loading pressure of 100 Hz; (b) High frequency voltage response of GO/Gr composite bilayer with loading frequencies of 2, 8, 10 kHz, respectively. The curve follows the input pressure signal[28].
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He-ping SU, Chen-xue WANG, Yang-yang ZHU, Lu WANG, Zhan-guo LI, Li-juan WANG. Research progress of graphene pressure sensors in wearable electronic devices[J]. Chinese Journal of Liquid Crystals and Displays, 2023, 38(8): 1062
Category: Research Articles
Received: Mar. 15, 2023
Accepted: --
Published Online: Oct. 9, 2023
The Author Email: Zhan-guo LI (lzhg000@126.com), Li-juan WANG (wlj15@163.com)