Laser & Optoelectronics Progress, Volume. 54, Issue 10, 101203(2017)
Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry
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Wang Dapeng, Jin Xing, Zhou Weijing, Li Nanlei. Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(10): 101203
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jun. 11, 2017
Accepted: --
Published Online: Oct. 9, 2017
The Author Email: Wang Dapeng (ajwzajwz@163.com)
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