Optics and Precision Engineering, Volume. 20, Issue 7, 1500(2012)
SU-8 chevron electrothermal micro-actuator with three-layer structures
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ZHANG Ran, CHU Jin-kui, WANG Hai-xiang, CHEN Zhao-peng. SU-8 chevron electrothermal micro-actuator with three-layer structures[J]. Optics and Precision Engineering, 2012, 20(7): 1500
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Received: Mar. 2, 2012
Accepted: --
Published Online: Aug. 9, 2012
The Author Email: ZHANG Ran (zr1111409@yahoo.com.cn)
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